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Tool order: LETI installs FEI’s Titan S/TEM microscope in new R&D facility |
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May 16, 2006 at 03:34 PM |
 The Laboratoire d'Electronique de Technologie de l'Information (LETI), France, has selected and installed a Titan 80-300 scanning / transmission electron (S/TEM) microscope, from FEI.
Hailed as the most powerful commercial microscope available today, LETI
will use the tool for advanced process characterization work for 65nm
and below nodes. The Titan has been installed in LETI's new Centre for Innovation in
Micro and Nanotechology (MINATEC) that has yet to be officially opened.
"As one of the most advanced tools of the nano-characterization platform of MINATEC, the FEI Titan(TM) 80-300 is now in operation," stated Philippe Brincard of LETI's nano-characterization department. "It will allow us to characterize very advanced technologies in microelectronics (high resolution, chemical analysis and doping imaging by holographic technique) and to characterize nano-materials developed within our fundamental research laboratories (carbon nanotubes, quantum wells, magnetic domain, etc),"
The Titan has been installed in LETI's new Centre for Innovation in Micro and Nanotechology (MINATEC) that has yet to be officially opened.
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