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Design Win: CVD equipment supplier designs in AE’s Sekidenko temperature sensors |
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May 16, 2006 at 02:48 PM |
 Advanced Energy Industries, has had its Sekidenko temperature and emissivity instrumentation technology designed into a leading equipment manufacturer's CVD tool platform to handle multi-channel temperature measurement for use in sub-90nm low-k dielectric film and high-stress silicon nitride cures.
"This design win demonstrates AE's talent for addressing our customers' process concerns with innovative technology," noted Dr. Hans Betz, AE president and CEO. "Applying our broad application expertise in thermal instrumentation, we worked in partnership with this customer to build an application-specific temperature and emissivity solution that optimizes their process. As we grow our position in this core semiconductor
market, we continue to proactively listen to our customers to help them gain competitive advantages with our solutions."
Sekidenko Optical Fiber Thermometers (OFTs) with real-time emissivity compensation are in-situ, non-contact instruments that are designed to give improved within-wafer and wafer-to-wafer temperature uniformity thus aiding overall process yields.
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