ABSTRACT

An improved technique has been developed to determine the destruction and removal efficiency (DRE) of point-of-use abatement systems (called local scrubbers). In this improved method, the DRE value is calculated using the exhaust gas mass flow rates. To determine the mass flow rates, the volumetric concentrations, measured by two Fourier transform infrared absorption spectrometers, as well as air temperatures, pressures and volumetric flow rates, are required.