Chin-Tsao Yang, Shu-Hou Wang, Milton Li, Wu-Hsiung Fu, & Max Chen, Facility department, Powerchip Semiconductor Corporation

ABSTRACT
During the design of PSC's Fab 12A, whole system efficiency was promoted, particularly in terms of power consumption. One of the most effective energy-saving projects was to lower the temperature of cooling water to promote the operational efficiency of the chiller system. This measure resulted in power savings for the chiller system of about 15 percent or some 7GWH of electricity a year.