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28th Edition: Cost-reduction opportunities through tote supply of chemicals and slurry |
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Dec 14, 2005 at 03:09 PM |
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J. Connelly & W. Curcie, Infineon Technologies, Richmond, Virginia, USA ABSTRACT In high-volume semiconductor factories (Fabs), the use of tote supply for chemicals and slurries can significantly reduce operating costs. In cases where systems were not originally designed to accommodate totes, transitioning to a tote supply may require custom engineering and logistics solutions. This article relates the experiences of one factory in transitioning several systems from drum to tote supply. These efforts saved over $340,000 annually.
28th Edition: Cost-reduction opportunities through tote supply of chemicals and slurry
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