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Cost-reduction opportunities through tote supply of chemicals and slurry

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J. Connelly and W. Curcie, Infineon Technologies

ABSTRACT

In high-volume semiconductor factories (Fabs), the use of tote supply for chemicals and slurries can significantly reduce operating costs. In cases where systems were not originally designed to accommodate totes, transitioning to a tote supply may require custom engineering and logistics solutions. This article relates the experiences of one factory in transitioning several systems from drum to tote supply. These efforts saved over $340 000 annually.
 

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