Ed Guttes, Fiona Lee & Monty Stranski, IDC, Portland, OR, USA

ABSTRACT

The goal of a Fab plant designer is to maximise cost effectiveness of the plant area to the technology to be used. This is a complex issue with a high degree of uncertainty when future requirements are brought into the evaluation. A graphical analysis based on wafer throughput and other relevant factors is shown to produce an optimum range of values upon which the Fab Designer can base his new development with some confidence.