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IBM acquires lithography APC software business from Inficon |
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Jan 27, 2006 at 10:15 PM |
IBM has acquired Inficon's advanced process
control software IP for advanced lithography tool applications. The technology
was originally developed by New Vision Systems, which was acquired by Inficon
in 2003. IBM and Intel had both been users of the software.
"This acquisition further expands and
strengthens our portfolio of factory process control solutions," said
Joseph Nemeth, Vice President of Semiconductor Industry, IBM Engineering &
Technology Services. "We see the ARGUS product as providing a critical
solution to the semiconductor industry in both lithography development and
early prototype manufacturing and it will be a true asset to our clients."
IBM's Engineering & Technology Services
(E&TS) group and Microelectronics businesses will continue to provide
global sales, support, and services coverage to the roster of ARGUS software
clients, according to the company. Critical development and support personnel
from Inficon will join IBM. No financial details about the deal were given.
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