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Tool Orders: DongbuAnam selects Mattson's Aspen III eHighlands low-k strip tool |
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Jan 27, 2006 at 02:15 PM |
 DongbuAnam Semiconductor, Korea's largest pure-play foundry has selected Mattson Technology's Aspen III eHighlands low-k/copper strip system for 90 nm back-end-of- line (BEOL) strip applications, including BARC (bottom antireflection coating) etchback, trench and via ashing, to produce DSP's at its 200mm fab. The system has already been shipped.
DongbuAnam will also use the tool to develop advanced sub-70 nm BEOL applications, including low-k strip, barrier removal and copper clean steps, according to Mattson. "For versatile and competitive foundry operations, we need suppliers who can address a wide range of application needs and offer strong local support," said Dr. Heung Joon Park, senior executive vice president for DongbuAnam Semiconductor. "We chose Mattson, an equipment provider known for its leading strip technologies and excellent support services, because the Aspen III eHighlands strip system delivers the high productivity, low cost-of-ownership and platform extendibility we need for high-volume production and development of our most advanced chips." "Building on the proven strip and RTP systems already installed at DongbuAnam, the Aspen III eHighlands was selected as a result of the higher technology and cost advantages the system provided over a long-standing incumbent supplier," said J. W. Kim, Mattson Technology's Korea country manager.
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