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28th Edition: Designing sustainable water systems in semiconductor fabs

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Texas Instruments and Matros Technologies win EPA’s Clean Air Excellence Award 03 Jul 2008 Richard Templeton receives 2007 SEMI Akira Inoue award 06 Feb 2008 Intel to become biggest user of renewable energy in the U.S. 28 Jan 2008 “Green Electronics” push for ISSCC’s event 25 Jan 2008 UMC gains environmental honors from ACGA 18 Dec 2007 Intel’s Ocotillo campus gains EPA water efficiency award 05 Dec 2007 IBM reduces wafer reclaim costs with new process 01 Nov 2007 Jazz Semiconductors back in compliance with U.S. EPA regulations 14 Sep 2007 National Semiconductor’s Arlington fab reaches new safety milestone 13 Sep 2007

EHS News RSS Feed

Texas Instruments and Matros Technologies win EPA’s Clean Air Excellence Award 03 Jul 2008

Richard Templeton receives 2007 SEMI Akira Inoue award 06 Feb 2008

Intel to become biggest user of renewable energy in the U.S. 28 Jan 2008

“Green Electronics” push for ISSCC’s event 25 Jan 2008

UMC gains environmental honors from ACGA 18 Dec 2007

Intel’s Ocotillo campus gains EPA water efficiency award 05 Dec 2007

IBM reduces wafer reclaim costs with new process 01 Nov 2007

Jazz Semiconductors back in compliance with U.S. EPA regulations 14 Sep 2007

National Semiconductor’s Arlington fab reaches new safety milestone 13 Sep 2007

EHS Product Briefs RSS Feed
New Product: PoU abatement system from TecHarmonic reaches 95 percent DRE 29 Jun 2006 Product Briefing Outline: TecHarmonic Inc. has launched the Alpine-S, claiming that it is the industry's first and only point-of-use (PoU) gas abatement system with the capability to abate Read More Silane flash arrestor for inline applications 08 Oct 2004 Product Briefing Outline: Silicon Skunkworks Inc. has launched the RB3S, a silane flash arrestor device that is placed inline on operating Sih4 gas lines. If a breach occurs in the line, the Read More New Product: Helium leak detection and analysis speeded up 08 Oct 2004 Product Briefing Outline: The INFICON UL5000 Helium Leak Detector is designed to meet the most critical and demanding leak detection applications. Featuring INFICON's proprietary software algorithms I-CAL and Hydro-S in a field-proven vacuum design, the UL5000 provides testing flexibility, high sensitivity and quick accurate results Read More

EHS Product Briefs RSS Feed

New Product: PoU abatement system from TecHarmonic reaches 95 percent DRE 29 Jun 2006

Product Briefing Outline: TecHarmonic Inc. has launched the Alpine-S, claiming that it is the industry's first and only point-of-use (PoU) gas abatement system with the capability to abate Read More

Silane flash arrestor for inline applications 08 Oct 2004

Product Briefing Outline: Silicon Skunkworks Inc. has launched the RB3S, a silane flash arrestor device that is placed inline on operating Sih4 gas lines. If a breach occurs in the line, the Read More

New Product: Helium leak detection and analysis speeded up 08 Oct 2004

Product Briefing Outline: The INFICON UL5000 Helium Leak Detector is designed to meet the most critical and demanding leak detection applications. Featuring INFICON's proprietary software algorithms I-CAL and Hydro-S in a field-proven vacuum design, the UL5000 provides testing flexibility, high sensitivity and quick accurate results Read More

28th Edition: Designing sustainable water systems in semiconductor fabs

Dec 14, 2005 at 04:38 PM

Pablo Ruiz, RFAB Process Waters and Drains Project Manager, Texas Instruments, Dallas, Texas, USA

ABSTRACT

In the first quarter of 2004, TI began design of its new wafer fabrication facility in Richardson, Texas, five miles north of the main Dallas campus. We reexamined how to competitively build and operate this new facility and reconsidered all of our old paradigms of how we should build a wafer fab. By the end of the design process we determined that we could build a competitive fab while reducing first costs and ongoing operational costs. In this article I will be discussing some of these design elements in TI's newest fab we now call RFAB.

28th Edition: Designing sustainable water systems in semiconductor fabs

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