Pablo Ruiz, RFAB Process Waters and Drains Project Manager, Texas Instruments, Dallas, Texas, USA

ABSTRACT

In the first quarter of 2004, TI began design of its new wafer fabrication facility in Richardson, Texas, five miles north of the main Dallas campus. We reexamined how to competitively build and operate this new facility and reconsidered all of our old paradigms of how we should build a wafer fab. By the end of the design process we determined that we could  build a competitive fab while reducing first costs and ongoing operational costs. In this article I will be discussing some of these  design elements in TI's newest fab we now call RFAB.