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New Product: CyberOptics wafer sensor meets space limitation in small footprint tools |
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Nov 25, 2005 at 05:22 PM |
Product
Briefing Outline: CyberOptics
Semiconductor, has made its wafer mapping sensors in a smaller package to
accommodate applications where space is limited or a smaller sensor footprint
is desired. The EX-QS features the same capabilities as standard size EX-Q
mappers, which are used for the detection of semiconductor wafers and slotting
errors in cassettes or FOUPs.
Problem: The sensors are insensitive to interference from the
mapping environment because their patented dual and wide beam technologies and
built-in ambient light filter minimize stray reflections and fluorescent
lighting influences. The EX-QS sensors have no moving parts, thus eliminating
any potential for particulate contamination; and because they employ reflective
technology, the sensors are non-intrusive, thereby mitigating the chance of
wafer damage during mapping. The sensors can be used as replacement for other
reflective sensors that are challenged by highly reflective, dark or ultra-thin
wafers.
Solution: Like the standard EX-Q, the EX-43QS and EX-73QS
sensors utilize reflective laser technology, and optimize the sensors' optical
plane geometry to virtually eliminate any potential for stray reflections from
FOUPs, cassettes, or other wafers. As a result, these sensors can quickly and
reliably detect all types of wafers regardless of diameter, edge geometry,
thickness or coating. They utilize laser transmitters and receivers fine-tuned
for maximum sensitivity to excel at detecting dark wafers at factory gain
settings and are compatible with flatted or notched wafers of any size
including 300mm. The EX-QS employs an extremely thin (0.05 mm) laser stripe
combined with multiple apertures and spatial filtering to reduce noise and
ensure consistent detection of thin and cross-slotted wafers at one gain
setting.
Applications: Used in a
wide variety of applications as well as applicable to highly reflective, dark or ultra-thin wafers.
Platform: The EX-QS Series Class 1 sensors are an easy to use
"off-the-shelf" solution that requires no amplification or signal
conditioning, and can be mounted on wafer handling devices. They come in two
stand-off distances: 1.5-inch and 2.2-inch, have operating ranges from 1.4- to
2.35- inches, and conform to IEC 60825-1 (2001-08) laser safety and to the
laser safety requirements of SEMI S2-0200.
Availability: October 2005 onwards
http://www.cyberopticssemi.com/products/EXQ.html
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Critical Components 
