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Product Briefing
Outline: Mentor Graphics
Corporation has launched the "Calibre OPCverify" tool, a new generation of OPC technology
and has expanded the design for manufacturing (DFM) solutions from Mentor. Calibre
OPCverify uses silicon-proven simulation models from Calibre OPCpro, providing
100% simulation coverage of the entire chip to ensure silicon-patterning
success, according to the company.
Problem: The increased complexity of
resolution enhancement technology (RET) at 65 nanometers is impacting
lithographic yield in several ways. The major contributors to declining yields
are: a smaller lithographic process window, increased sensitivity to layout
topology in the lithographic process, and complex mask rule constraints that
impact the application of RET. These issues must be addressed with a fast,
accurate and easy-to-use RET verification solution that detects yield-limiting
conditions.
Solution: Calibre
OPCverify, uses silicon-proven simulation models from Calibre OPCpro
for RET verification, with a claimed 100% simulation coverage of the
entire chip. The pixel-based simulation engine accounts for the effects
of process variability using patented algorithms that define the
conditions (dose, focus) that adversely impact pattern transfer. All
Calibre OPCverify modeling capabilities have been characterized for the
most advanced process conditions in production, including immersion
lithography, according to the company. The rigorous model development
and verification methodology used for the Calibre OPCverify tool allows
both RET recipe validation and mask verification. The set-up and
configuration of Calibre OPCverify is enabled through a user interface
called the Calibre Verification Center. With Calibre OPCverify and the
Calibre Verification Center, a comprehensive and accurate RET mask
verification flow can be integrated seamlessly into existing
post-layout flows that is claimed to take, less than 24 hours.
Applications: OPC
on RET masks.
Platform: Calibre OPCverify and the Calibre
Verification Center take advantage of existing workstation hardware. Because of
the design-independent nature of the tool, users experience very predictable
runtimes and scalability, the company claims. Actual run time is dependent on
the hardware used, the Calibre OPCverify terapixel simulator is scalable to
hundreds of CPU's, and can handle flat or hierarchical data.
Availability: Calibre OPCverify and the Calibre
Verification Center are available immediately. Pricing starts at $80K US
dollars
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Lithography 
