Online information source for semiconductor professionals
Point-of-Use Exhaust Control for Semiconductor Manufacturing: Saving Energy, Saving Money, Improving
Popular articles
Micron moving fast on Hynix in Q208 NAND flash rankings, says iSuppli - 19 August 2008
Numonyx to close California Technology Center - 12 August 2008
Qimonda starts major reorganization: exits PC DRAM market - 13 October 2008
Applied Materials sees higher CapEx spending for 2009 - 15 August 2008
Micron close to Inotera share purchase, says Gartner - 06 October 2008
ABSTRACT
Ameans to reduce energy consumption while improving both operator safety and product yield is discussed. Furthermore, details of a simple, reliable, fail-safe system for reducing the overall flow of air through the facility are given.
 |
Please login to download the paper. No account yet? Please register. It's free! |