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Tool Orders: Tegal sells etch tool for RRAM memory development |
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Dec 21, 2005 at 03:15 PM |
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Tegal
Corporation (Nasdaq:TGAL) today announced that a US-based technology company
has placed an order for 6540 advanced etch system for the development of RRAM
(Resistive Random Access Memory) devices incorporating certain unique new
materials. The recertified 6540 advanced etch system is valued at over $1.5
million and will be delivered to the customer this month.
The development program is aimed at producing
non-volatile, high-density memory cells separately from logic devices for
system-on-chip applications. RRAM development is a focus for several device
manufacturers because of its ideal attributes for high density, low cost and
low power consumption.
"Tegal is the leading company in plasma
etch technology for several types of non-volatile memory devices, such as
FeRAM, MRAM, RRAM and polymeric memories," said Murali Narasimhan, Tegal's
recently appointed Vice President of Marketing. "We announced an order
earlier this year for an Endeavor PVD system which was delivered to another
company pursuing RRAM development. Tegal is uniquely positioned to provide both
etch and deposition solutions in this emerging market."
The Tegal 6540 used in this application
features the unique dual-frequency Hre- etch process module upgraded with a
high temperature ESC capable of processing at wafer temperatures as high as
500C. This extended temperature range enhances the removal of hard-to-etch
metals and metal oxide films without re-deposition on the surface of the
device.
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