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Tool Order: ProMOS Technologies places repeat orders with Mattson |
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Nov 30, 2005 at 10:22 AM |
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ProMOS
Technologies has placed follow-on orders for multiple RTP and strip systems for
its new 300 mm fab (Fab III) in Taichung, Taiwan. The systems, which include
the Helios, Aspen III ICPHT and Aspen III Strip for contact clean applications,
will continue to be utilized by ProMOS for the volume production of 512 Mb
DDR1/2 advanced memory devices using 90 nm technology. Delivery of these tools
is expected to begin next month to support further 300 mm capacity expansion
and expands the number of existing Mattson tools already installed at ProMOS'
production facilities.
"At our new
Fab 3, we are planning to have a wafer output of slightly under 10,000 300 mm
wafers on 90 nm process in the fourth quarter of this year, so we need
equipment that delivers increased throughput, greater processing flexibility
and lower total cost-of-ownership to help us meet our aggressive 90 nm mass
production schedule," said Dr. Len Mei, senior vice president of ProMOS
Technologies. "Mattson's strip and RTP systems are consistently
outperforming competitive tools and meeting our high productivity and
next-generation production requirements. We will continue to look to Mattson
for its advanced technologies and strong local customer support."
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