Product Briefing Outline: Trazar Corporation has launched what it claims is the industry's first configurable automatic impedance match (CAIM) development platform for RF Matches, called "Horizon Match," that is expected to reduce plasma tool design and development time by more than half, which is done by integrating readily available and verified building blocks. It is intended for 200mm and 300mm, plasma-based semiconductor equipment, medical systems and industrial applications.

Solution: Horizon Match is based on two classes of modules from which to choose. One is a comprehensive set of verified building blocks that are common to most RF Matches. The choice of building blocks is based on the customer's chamber and manufacturing process. The other category provides the functionality unique to a customer's system and their preferences. Trazar calls this a "personality module" as it can be configured and programmed to accommodate the inherent differences in each system. Most RF Matches available today are based on one particular type of variable capacitor -- air, gas, or vacuum. But because of the built-in flexibility, RF Matches developed from Horizon Match will be able to use any variable capacitor. Variable capacitors are the heart of any RF Match and can range in cost, performance and reliability. The versatility of the configurable match allows for various performance metrics within an individual system and process without having to commit to a specific capacitor technology, or obsolete a current one.

Applications: RF plasma tools 200mm & 300mm wafer sizes.

Platform: Trazar is creating a development system where the type of variable capacitor used is not a mitigating factor and the customer gets a cost-optimized solution.

Availability: Full productization capabilities of approved and authorized RF Matches will be available in Q1 2006.