Problem: The NanoPulse uses dynamic threshold analysis to determine ambient noise level and form the first part of ESD pulse event discrimination. It also addresses a spectral range of 1MHz to 8GHz, which accommodates ESD event bandwidth as well as most commonly encountered electromagnetic noise frequencies. The NanoPulse also tracks electromagnetic noise levels separately from ESD event detection and analysis, allowing separate alarm reporting.

Solution: The Series 7000 monitor and its associated workstation and/or process equipment has the capability to directly perform SPC calculations and direct tool communication, in addition to previously available reporting functions. Another feature of the NanoPulse is antenna independence. Both active and passive antennas in a variety of configurations can be implemented to further tune ESD event detection. In some cases, specialized antennas can be implemented which are direct analogs for very sensitive product and which can correctly represent true product vulnerabilities to radiated energy. In applications with accessibility and space restraints, small form-factor antennas can be installed directly at the monitoring point with sensor processing taking place in the Series 7000 at a more accessible location. The digital I/O communication plug-in module provides a proactive function when interfaced to PEMS to receive and report warning or alarm conditions to control the process. This platform will directly reduce process variations, decrease scrap/rework and improve process yields at the specific workstation level. The result will be process yield improvement and an increase in tool availability resulting in an increase in factory capacity.

Applications: The combination of hardware and software allows the user to monitor, analyze and control processes 24/7, 365 days a year.

Platform: Novx has developed this instrument with customer programmable sensitivity and alarm threshold sensing to meet and exceed customer requirements for an extended period of time. The instrument is designed with a modular construction allowing the user to add optional plug-in process enhancements as required. The plug-in modules include digital I/O communication adding direct interface to PEMS, particle count reporting, field sensing with decay testing, EMI detection, operator body voltage or current and ground monitoring. This instrument is capable of communicating with industry standard particle counters and particle detectors in addition to its own ESC/ESD-related monitoring capabilities with the ability to report data using RS-485, ModBus, Ethernet, and Wireless Ethernet (802.11a/b/g) protocols.

Availability: November 2005 onwards.