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Freescale claims breakthrough in 90nm non-volatile memory |
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Nov 28, 2005 at 07:44 PM |
Freescale Semiconductor has claimed that it has successfully fabricated
a 24-Mbit memory array using non-volatile technology at the 90nm node
with bulk CMOS. This is the first time this has been achieved,
according to the company. The 24-Mbit memory array was manufactured at
Freescale's Austin Technology & Manufacturing Center.
"The industry anticipates that conventional embedded flash memory
technology will reach its scaling limit within the next four years due
to high-operating voltage, fabrication process complexity and cost,"
said Freescale Chief Technology Officer Dr. Claudine Simson. "A viable
alternative is crucial for key suppliers to automotive, wireless and
consumer markets to continue to scale their products and add new
functionality. Silicon nanocrystal technology offers lower operating
voltages, reduced memory module size, simpler process flow and lower
manufacturing costs. Additionally, it requires no new materials or
wafer fabrication equipment, allowing for immediate compatibility with
existing production wafer fabs. By demonstrating that
silicon-nanocrystal memories can be reliably produced at higher
densities, we have taken yet another step in establishing technology
leadership in the embedded non-volatile memory market."
Silicon nanocrystal memories are more scaleable than conventional
floating gate-based flash technology, as their tunnel oxide thickness
can be reduced without impacting data retention. The charge is stored
on isolated nanocrystals and is lost only from those few nanocrystals
that align with defects in the tunnel oxide - while the same defects
would result in significant charge loss from a conventional floating
gate. A thinner tunnel oxide permits lower-voltage operation,
substantially reducing the memory module area needed to generate the
bit-cell programming voltages, and allowing for significant wafer
processing simplifications and manufacturing cost reductions.
"Silicon nanocrystal storage is a promising alternative to
industry-standard embedded NOR memory, as it offers the capability of
lowering both the size and cost of the device," said Semico Analyst Jim
Handy. "Freescale's achievement is a key development in the
introduction of the 'faster, cheaper' memory that the semiconductor
industry increasingly requires."
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