Problem: Correct Interface A implementations will have a significant impact on the equipment manufacturer's software architecture to enable full access to necessary data as requested by the International SEMATECH Manufacturing Initiative (ISMI). As with any new SEMI standard, several product iterations are needed to ensure that the requirements for both users and equipment suppliers are satisfied. According to Cimetrix, its fourth generation CIMPortal product meets those needs, enabling the move forward with finalizing Interface A implementations.

Solution: Fabs will use Interface A for APC data gathering and e-diagnostics, while the existing SECS/GEM interface will remain intact for MES connectivity. CIMPortal provides complete Interface A functionality, accommodates different software and hardware architectures, and establishes a fundamentally correct framework that complies with ISMI guidelines. The user can integrate CIMPortal directly within the equipment supplier's tool controller as an embedded solution, or install CIMPortal on a stand-alone Windows PC.  

New features now allow equipment suppliers to comply with the Japanese tool data interface (TDI) functional specification. In addition, the CIMPortal product family also provides tools for factories to communicate with Interface A enabled equipment, including the underlying technology for the ISMI EDA Client Connection Emulator (ECCE), a design reference artifact.