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300mm Report
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 Date Item Title Hits
Dec 04, 2007 at 04:19 PM New Product: TEL’s CELLESTA+ offers 333 wph throughput for FEOL critical cleans 1094
Dec 03, 2007 at 04:32 PM New Product: KLA-Tencor offers the Aleris 8500 for composition and film thickness measurement 1013
Dec 03, 2007 at 04:23 PM New Product: KLA-Tencor combines bare wafer flatness, shape, edge roll-off and nano-topography in 1 1189
Dec 03, 2007 at 02:39 PM New Product: SOKUDO’s new RF3T system pushes 200wph throughput 1060
Nov 29, 2007 at 04:29 PM New Product: Applied Materials adds ‘FullVision’ real-time control to CMP platform 882
Nov 29, 2007 at 11:46 AM New Product: Bevel-edge tool from Lam Research offers complete wafer flow single system cleaning 976
Nov 28, 2007 at 02:30 PM New Product: Cymer’s new ‘Gas Lifetime eXtension’ upgrade offers 10x better gas exchanges 866
Nov 26, 2007 at 06:41 PM New Product: Applied Materials offer 40 percent greater throughput with ‘UVision 3’ inspection tool 804
Nov 13, 2007 at 04:21 PM New Product: CyberOptics’ new ‘WaferSense’ Auto Vibration System tackles equipment vibration issues 893
Nov 13, 2007 at 02:18 PM New Product: ATMI’s ‘AutoClean’ ion implanter increases source life by over 40 percent 1028
Nov 02, 2007 at 03:21 PM New Product: FEI’s Titan3 reduces environmental interference 1053
Oct 18, 2007 at 04:02 PM New Product: Low cost development WLP deposition tools offered by Surfect Technologies 1125
Oct 18, 2007 at 03:51 PM New Product: Swagelok’s CR-288 chemical concentration monitor operates in real time 1255
Oct 04, 2007 at 10:49 AM New Product: Tokyo Electron delivers high-k CVD capability on Trias refined platform 1228
Sep 25, 2007 at 03:52 PM New Product: Pyxis’ NexusRoute auto router is DFM-aware and yield-driven 1487
Sep 24, 2007 at 05:13 PM New Product: K-Patents offers real-time chemical concentration monitoring 1155
Sep 19, 2007 at 04:37 PM New Product: Brion supports ASML’s Double Dipole Lithography technology 1134
Sep 13, 2007 at 04:00 PM New Product: Cymer’s 90W XLR 600i laser designed for immersion and Double Patterning 1027
Sep 11, 2007 at 04:28 PM New Product: Voltaire and Synopsys offer HPC for mask prep cycle-time reduction 1211
Sep 06, 2007 at 04:45 PM New Product: IR 3100S small spot MBIR system from AMS measures DRAM 3D etched structures 1039
Sep 06, 2007 at 04:31 PM New Product: Rudolph’s Explorer platform clusters multiple inspection tasks in one tool 1052
Sep 06, 2007 at 04:18 PM New Product: Tiger Optics’ new HALO+ CRDS analyzer covers widest dynamic range 1240
Sep 06, 2007 at 11:19 AM New Product: IR3100N extended wavelength MBIR system from AMS provides measurement of 3D structures 922
Aug 22, 2007 at 03:56 PM New Product: Novellus enters 300mmPrime time with Vector Extreme 1301
Aug 21, 2007 at 04:04 PM New Product: Cabot develops highly tunable B6600 barrier slurry for advanced Cu/low-k 961
Aug 21, 2007 at 03:27 PM New Product: TEA Systems' Vector Raptor tackles Double Patterning overlay issues 1099
Aug 17, 2007 at 11:51 AM New Product: The ASML TWINSCAN XT:1000 KrF scanner handles 80nm features 1114
Aug 16, 2007 at 06:28 PM New Product: The Entegris Aeronex Gas Purification System handles immersion litho tools 953
Aug 16, 2007 at 12:30 PM New Product: Nikon’s NSR-S310F scanner extends dry ArF beyond 65 nm 1051
Aug 15, 2007 at 02:40 PM New Product: ORION Helium ion microscope from Carl Zeiss SMT breaks new ground in microscopy 1081
Aug 14, 2007 at 03:05 PM New Product: NEHP’s pre-designed utility modules cut tool install complexity 1246
Aug 14, 2007 at 02:32 PM New Product: KLA-Tencor’s SURFmonitor replaces AFM’s for bare wafer inspection 943
Jul 24, 2007 at 04:31 PM New Product: Intevac’s novel ‘Lean Etch’ platform posts 200wph productivity 1152
Jul 24, 2007 at 03:27 PM New Product: Oxide spacer system from Applied Materials enables 32nm self-aligned DP 1243
Jul 10, 2007 at 05:04 PM New Product: Sokudo boosts speed of new RF3S track system by 20 percent 1199
Jul 10, 2007 at 04:42 PM New Product: Asyst addresses tool data streams with dynamic data connection 1037
Jul 09, 2007 at 02:41 PM New Product: New KLA-Tencor HRP-350 uses 20nm diamond stylus to speed topography profiling 1127
Jul 05, 2007 at 02:48 PM New Product: Ferro’s new ILD slurry eliminates reverse mask etch-back steps 1064
Jul 05, 2007 at 02:36 PM New Product: AE’s Paramount RF-power delivery system has network analyzer type accuracy 1092
Jul 04, 2007 at 04:05 PM New Product: Tevet achieves two second per wafer measurement cycle for CVD processes 969
Jul 04, 2007 at 03:01 PM New Product: New wafer defect review system from KLA-Tencor addresses SEM Non-Visual defects 1065
Jul 03, 2007 at 02:20 PM New Product: VLSI Standards offers calibration and system monitoring of wafer-edge exclusion zone 895
Jun 28, 2007 at 05:10 PM New Product: Ashable hard mask process from Novellus targets high aspect ratio etch 1179
Jun 28, 2007 at 12:42 PM New Product: KLA-Tencor tackles critical defect inspection with two new dedicated brighfield tools 988
Jun 28, 2007 at 10:50 AM New Product: 2nd gen MediaPAK module from Purafil offers leak-free air filtration 1120
Jun 25, 2007 at 02:46 PM New Product: Lam’s new Motif etch system targets 10nm post-lithography CD shrinks 1206
Jun 22, 2007 at 10:04 AM New Product: Ferro’s new formulated ceria slurry targets 65nm STI processes 1028
Jun 21, 2007 at 06:29 PM New Product: MKS offers improved process control parameters with new CONTINUUM gateway 950
Jun 19, 2007 at 02:24 PM New Product: Advanced circuit edits handled by FEI’s V600CE FIB tool 935
Jun 19, 2007 at 12:49 PM New Product: KLA-Tencor’s Puma 9150 offers improved defect capture at 45nm & below 1151
 
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