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300mm Report
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 Date Item Title Hits
Jun 01, 2007 at 02:55 PM New Product: BOC Edwards aims HELIOS 6 at high-flow gas abatement requirements 1381
May 30, 2007 at 03:13 PM New Product: KLA-Tencor goes Linux for OPC & RET requirements in new LithoWare release 981
May 29, 2007 at 12:52 PM New Product: Brion adds Tachyon LAD to design flow assistance 1042
May 21, 2007 at 02:33 PM New Product: RASIRC raises bar on high-purity steam generation in smaller form-factor 951
May 17, 2007 at 12:34 PM New Product: IDE upgrades EMI cancellation system for sensitive tools 914
May 17, 2007 at 12:24 PM New Product: PDF Solutions’ new software targets memory fabs for focused ramp & yield enhancements 938
May 15, 2007 at 03:20 PM New Product: Applied Materials adds 30 percent more silicon strain in the Producer Celera 1121
May 14, 2007 at 05:53 PM New Product: Aquest Systems launches ‘No-Wait-Manufacturing’ 300mm fab AMHS 1157
May 10, 2007 at 02:25 PM New Product: Negevtech upgrades defect sensitivity in its Argus 3200 inspection tool 909
May 10, 2007 at 02:03 PM New Product: VUV xenon lamp system from OSRAM offers new wafer surface cleaning methodologies 967
Apr 25, 2007 at 03:52 PM New Product: Carl Zeiss SMT’s MeRiT MG 45 handles all 45nm mask repairs 1141
Apr 19, 2007 at 02:28 PM New Product: New mask etcher from Applied Materials enables aggressive OPC techniques 1202
Apr 19, 2007 at 01:02 PM New Product: ATMI’s RegenSi wafer reclaim offers shorter etch times for 300mm wafers 1033
Apr 04, 2007 at 05:06 PM New Product: 80:1 aspect ratio etched trenches reported on Applied’s Centura Mariana 1079
Apr 04, 2007 at 04:49 PM New Product: Novellus extends PECVD technology to the 45nm node with higher productivity 1192
Mar 15, 2007 at 12:00 AM New Product: TeraScanHR inspection system handles complex reticles at the 45nm node 1106
Mar 13, 2007 at 06:00 PM New Product: 300mm warped wafers can be handled by IDE’s new wafer sorter 1356
Mar 13, 2007 at 05:31 PM New Product: Brewer Science’s ARC 160 cuts out-gassing problems 1257
Mar 12, 2007 at 05:15 PM New Product: Flomerics’ “SmartParts” increase airflow simulation accuracy in cleanrooms 1084
Mar 12, 2007 at 03:25 PM New Product: Vistec offers photomask CD measurement down to 32nm 1206
Mar 12, 2007 at 03:10 PM New Product: Fluoropolymer diaphragm valve from Partek passes a million cycles in slurry application 1088
Mar 12, 2007 at 11:52 AM New Product: Improved optical path enables 45nm mask metrology on the Vistec LMS IPRO4 1027
Feb 26, 2007 at 03:57 PM New Product: Timbre’s Profiler Application Server virtually eliminates downtime 1120
Feb 26, 2007 at 02:14 PM New Product: Brion accelerates Tachyon DFM capabilities for sub 45nm designs 1161
Feb 26, 2007 at 09:30 AM New Product: KLA-Tencor’s PROLITH 10 handles 32nm OPC effects 1155
Feb 19, 2007 at 05:44 PM New Product: Toshiba & partners use electrolyzed sulfuric acid for resist stripping 1410
Feb 08, 2007 at 06:13 PM New Product: KLA-Tencor’s Surfscan SP2XP has 30nm defect sensitivity 1318
Jan 05, 2007 at 02:18 PM New Product: Oxford Instruments provides new integrated TEOS solution for SiO2 PECVD 1602
Jan 05, 2007 at 02:02 PM New Product: Gigaphoton launches high NA laser light source for immersion tools 1371
Jan 04, 2007 at 03:02 PM New Product: Mallinckrodt Baker’s CLk-870 residue remover cuts process times 1438
Jan 04, 2007 at 02:49 PM New Product: CMP pad from Cabot offers improved pad life and performance repeatability 1462
Dec 21, 2006 at 02:14 PM New Product: PROMIS 5.8 MES give upgrade benefits for fabs 1414
Nov 29, 2006 at 08:05 PM New Product: Mentor Graphics offers Cell computing power for RET/OPC optimization 1520
Nov 29, 2006 at 07:00 PM New Product: Tokyo Electron boosts photoresist track system productivity with ‘LITHIUS Pro’ 2049
Nov 28, 2006 at 03:02 PM New Product: Factory Physics software suite handles supply chain changes 1686
Nov 28, 2006 at 02:33 PM New Product: Takumi targets hot spot IC design issues with two new tools 1493
Nov 28, 2006 at 10:06 AM New Product: SEZ’s ‘Esanti’ platform tackles 45nm volume production single wafer FEOL cleaning 1796
Nov 24, 2006 at 04:01 PM New Product: Synergy MPX tool from Rudolph with MMXRF extends opaque film analysis 1285
Nov 24, 2006 at 12:29 PM New Product: MM-16 from HORIBA Jobin Yvon collects full spectral ellipsometric data 1611
Nov 24, 2006 at 10:59 AM New Product: Micro Photonics’ Sarfus visualization technology boosts microscope sensitivity 1370
Nov 24, 2006 at 10:16 AM New Product: Rohm and Haas offers improved defect reduction with new CMP pads 1616
Nov 21, 2006 at 04:22 PM New Product: Varian Semiconductor’s ‘SuperScan’ corrects threshold voltage variability 1426
Nov 21, 2006 at 03:24 PM New Product: Nikon’s new NSR-SF150 i-line tool adopts wider exposure field 1545
Nov 20, 2006 at 06:35 PM New Product: SensArray ‘Integral Wafer’ handles harsh environments at the 65nm node 1221
Nov 20, 2006 at 05:26 PM New Product: New selective nitride etch process from FSI reduces ultra-thin oxide damage 1392
Nov 14, 2006 at 02:01 PM New Product: Applied Materials’ Producer GT is productivity dream machine for fabs 1552
Nov 07, 2006 at 03:45 PM New Product: Copper ECD filter from Entegris guards against acid reaction 1480
Nov 06, 2006 at 01:39 PM New Product: MKS cuts MFC requirements for SDS implant operations with new low pressure PiMFC 1163
Nov 02, 2006 at 06:08 PM New Product: GenISys new software speeds e-Beam lithography data-prep 1326
Oct 30, 2006 at 04:22 PM New Product: Advantest improves E-Beam tool for 65nm lithography applications 1221
 
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