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300mm Report
Home arrow Critical Components arrow Product Briefings arrow Critical Components & Sub-Systems
Critical Components & Sub-Systems
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 Date Item Title Hits
May 14, 2008 at 06:01 PM New Product: GF Piping Systems’ Type 567 Butterfly Valve improves wear for multiple applications 1514
Mar 13, 2008 at 04:33 PM New Product: Nexen’s Roller Pinion System handles long run linear motion control 2844
Dec 17, 2007 at 06:22 PM New Product: Entegris offers ‘Torrento’ high-flow liquid filters for wet etch and clean processes 3945
Dec 13, 2007 at 03:54 PM New Product: Aerotech’s WaferMax T rotary stage offers form factor benefits 3306
Dec 06, 2007 at 05:28 PM New Product: Thick film quartz heater modules from Watlow designed for wet chemistry 3188
Oct 18, 2007 at 03:51 PM New Product: Swagelok’s CR-288 chemical concentration monitor operates in real time 1987
Sep 24, 2007 at 05:13 PM New Product: K-Patents offers real-time chemical concentration monitoring 2275
Aug 14, 2007 at 03:05 PM New Product: NEHP’s pre-designed utility modules cut tool install complexity 2541
Jul 05, 2007 at 02:36 PM New Product: AE’s Paramount RF-power delivery system has network analyzer type accuracy 2270
Jun 21, 2007 at 06:29 PM New Product: MKS offers improved process control parameters with new CONTINUUM gateway 2236
Jun 18, 2007 at 10:00 AM New Product: Hach Ultra’s ORBISPHERE 510 enables precise process monitoring 2105
May 21, 2007 at 02:33 PM New Product: RASIRC raises bar on high-purity steam generation in smaller form-factor 2113
May 17, 2007 at 12:34 PM New Product: IDE upgrades EMI cancellation system for sensitive tools 2019
May 14, 2007 at 05:53 PM New Product: Aquest Systems launches ‘No-Wait-Manufacturing’ 300mm fab AMHS 2256
May 10, 2007 at 02:03 PM New Product: VUV xenon lamp system from OSRAM offers new wafer surface cleaning methodologies 2323
Mar 12, 2007 at 03:10 PM New Product: Fluoropolymer diaphragm valve from Partek passes a million cycles in slurry application 2202
Nov 07, 2006 at 03:45 PM New Product: Copper ECD filter from Entegris guards against acid reaction 2841
Nov 06, 2006 at 01:39 PM New Product: MKS cuts MFC requirements for SDS implant operations with new low pressure PiMFC 2551
Oct 19, 2006 at 04:48 PM New Product: Thermocouple sensor from Partek improves lifetime reliability 2878
Sep 20, 2006 at 04:17 PM New Product: GF Piping’s new butterfly valve suits corrosive environments 3150
Aug 29, 2006 at 06:47 PM New Product: Closed-loop digital ionization sensor from MKS Instruments handles static issues in EFE 2629
Aug 29, 2006 at 04:46 PM New Product: BlueShift Technologies offers innovative linear vacuum wafer handling system 2562
Aug 29, 2006 at 03:44 PM New Product: Enhanced ferrofluid magnetic liquids from Ferrotec boost critical sealing applications 2498
Aug 23, 2006 at 06:49 PM New Product: Advanced Energy’s new line of Sekidenko OFT’s provide precise temperature control 2009
Aug 22, 2006 at 02:19 PM New Product: Poly silicon furnace liner from Integrated Materials cuts particle defect levels 2488
Aug 17, 2006 at 04:21 PM New Product: GES5 Evolution from Sopra covers UV to near Infra-Red spectrum 1737
Jun 14, 2006 at 10:57 AM New Product: Piezo-driven nano-positioning from PI first in closed loop operation 2227
May 30, 2006 at 01:26 PM New Product: Thin film deposition controller from INFICON prevents mode hop 2153
Mar 27, 2006 at 09:44 AM New Product: New furnaceware from Integrated Materials mirrors wafer composition for the first time 2794
Nov 25, 2005 at 05:22 PM New Product: CyberOptics wafer sensor meets space limitation in small footprint tools 2551
Nov 25, 2005 at 05:22 PM New Product: CyberOptics wafer sensor meets space limitation in small footprint tools 2656
Nov 18, 2005 at 06:25 PM New Product: High density seal extends plasma chamber clean cycles 2532
Nov 18, 2005 at 06:25 PM New Product: High density seal extends plasma chamber clean cycles 2319
Oct 03, 2005 at 05:53 PM New Product: Trazar launches modular configurable RF plasma matching 2538
Sep 28, 2005 at 12:24 AM Pneumatically actuated 3-way diaphragm valve 4083
Sep 27, 2005 at 11:21 PM Compact design less than half the size of traditional vacuum gauges 2254
Sep 27, 2005 at 11:12 PM Vacuum cluster platform with improved compact configuration 2746
Sep 27, 2005 at 11:08 PM Diaphram valve offers precise linear flow control 4489
Sep 27, 2005 at 11:04 PM RGA’s get web health check 2844
Sep 27, 2005 at 07:58 PM FEOL wet station for volume production at 65nm & below 3274
Oct 08, 2004 at 11:00 PM Harsh duty dry pump for fluorine process 3468
Oct 08, 2004 at 10:00 PM Dry pump for low utility cost in volume production environments 2886
Oct 08, 2004 at 09:00 PM UHP gas pressure regulator reduces system footprint 4070
Oct 08, 2004 at 08:00 PM Linear Stage Uses Direct-Coupled Brushless Motor For High Servo Bandwidth And Smooth Velocity 2958
Oct 08, 2004 at 07:00 PM Remote plasma source maximizes process development flexibility 2903
Oct 08, 2004 at 06:00 PM Pressure transducer for stabilty and realiability in pressure measurments 2400
Oct 08, 2004 at 05:00 PM Magentic levitation rotary actuator with zero-contamination vacuum motion 4571
Oct 08, 2004 at 04:00 PM Copper electroplating gets finer filters 3522
Oct 08, 2004 at 03:00 PM Environmentally-frinedly cost-effective cleaning solution 3264
Oct 08, 2004 at 02:00 PM Factory Mutual 4910 rated resistant PVDF high purity sheet 2814
 
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