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300mm Report
Home arrow Product Briefings arrow Wafer Processing
Wafer Processing
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 Date Item Title Hits
May 15, 2008 at 01:23 PM New Product: Rudolph reduces CoO for macro defect inspection with new AXi 940 module 70
May 14, 2008 at 11:58 AM New Product: Applied Materials’ Inflexion edge polishing system cleans in a single pass 104
May 08, 2008 at 03:47 PM New Product: Mattson’s new ‘Alpine’ dry strip system offers 35 percent lower CoO 327
Feb 11, 2008 at 05:27 PM New Product: Axcelis’ Optima XE offers 10keV to 4MeV energy range for widest application range 2277
Feb 11, 2008 at 04:05 PM New Product: Nanometrics targets advanced CD control issues with NanoCD Suite 2054
Dec 05, 2007 at 05:22 PM New Product: Applied Materials’ ‘SEMVision’ G4 offers one defect-per-second review rate 2876
Dec 04, 2007 at 04:19 PM New Product: TEL’s CELLESTA+ offers 333 wph throughput for FEOL critical cleans 2155
Dec 03, 2007 at 04:32 PM New Product: KLA-Tencor offers the Aleris 8500 for composition and film thickness measurement 2109
Dec 03, 2007 at 04:23 PM New Product: KLA-Tencor combines bare wafer flatness, shape, edge roll-off and nano-topography in 1 1691
Nov 29, 2007 at 04:29 PM New Product: Applied Materials adds ‘FullVision’ real-time control to CMP platform 1652
Nov 29, 2007 at 11:46 AM New Product: Bevel-edge tool from Lam Research offers complete wafer flow single system cleaning 1980
Nov 26, 2007 at 06:41 PM New Product: Applied Materials offer 40 percent greater throughput with ‘UVision 3’ inspection tool 1623
Nov 13, 2007 at 04:21 PM New Product: CyberOptics’ new ‘WaferSense’ Auto Vibration System tackles equipment vibration issues 1548
Nov 13, 2007 at 02:18 PM New Product: ATMI’s ‘AutoClean’ ion implanter increases source life by over 40 percent 1789
Nov 02, 2007 at 03:21 PM New Product: FEI’s Titan3 reduces environmental interference 1449
Oct 18, 2007 at 04:02 PM New Product: Low cost development WLP deposition tools offered by Surfect Technologies 1604
Oct 04, 2007 at 10:49 AM New Product: Tokyo Electron delivers high-k CVD capability on Trias refined platform 1659
Sep 06, 2007 at 04:45 PM New Product: IR 3100S small spot MBIR system from AMS measures DRAM 3D etched structures 1755
Sep 06, 2007 at 04:31 PM New Product: Rudolph’s Explorer platform clusters multiple inspection tasks in one tool 1714
Sep 06, 2007 at 11:19 AM New Product: IR3100N extended wavelength MBIR system from AMS provides measurement of 3D structures 1428
Aug 22, 2007 at 03:56 PM New Product: Novellus enters 300mmPrime time with Vector Extreme 2023
Aug 14, 2007 at 02:32 PM New Product: KLA-Tencor’s SURFmonitor replaces AFM’s for bare wafer inspection 1463
Jul 24, 2007 at 04:31 PM New Product: Intevac’s novel ‘Lean Etch’ platform posts 200wph productivity 1396
Jul 24, 2007 at 03:27 PM New Product: Oxide spacer system from Applied Materials enables 32nm self-aligned DP 1876
Jul 09, 2007 at 02:41 PM New Product: New KLA-Tencor HRP-350 uses 20nm diamond stylus to speed topography profiling 1724
Jul 04, 2007 at 04:05 PM New Product: Tevet achieves two second per wafer measurement cycle for CVD processes 1398
Jul 04, 2007 at 03:01 PM New Product: New wafer defect review system from KLA-Tencor addresses SEM Non-Visual defects 1655
Jul 03, 2007 at 02:20 PM New Product: VLSI Standards offers calibration and system monitoring of wafer-edge exclusion zone 1577
Jun 28, 2007 at 05:10 PM New Product: Ashable hard mask process from Novellus targets high aspect ratio etch 1757
Jun 28, 2007 at 12:42 PM New Product: KLA-Tencor tackles critical defect inspection with two new dedicated brighfield tools 1292
Jun 25, 2007 at 02:46 PM New Product: Lam’s new Motif etch system targets 10nm post-lithography CD shrinks 2371
Jun 19, 2007 at 02:24 PM New Product: Advanced circuit edits handled by FEI’s V600CE FIB tool 1246
Jun 19, 2007 at 12:49 PM New Product: KLA-Tencor’s Puma 9150 offers improved defect capture at 45nm & below 1378
Jun 14, 2007 at 11:06 AM New Product: FEI’s DualBeam Expida 1255S offers full wafer STEM capabilities 1684
Jun 05, 2007 at 12:43 PM New Product: FEI launches first remote diagnostics program for microscopy tools 1469
Jun 04, 2007 at 02:17 PM New Product: Applied Materials offers BLOk II PECVD system for barrier films at 45nm and below 1754
May 17, 2007 at 12:24 PM New Product: PDF Solutions’ new software targets memory fabs for focused ramp & yield enhancements 1436
May 15, 2007 at 03:20 PM New Product: Applied Materials adds 30 percent more silicon strain in the Producer Celera 1791
May 10, 2007 at 02:25 PM New Product: Negevtech upgrades defect sensitivity in its Argus 3200 inspection tool 1299
Apr 04, 2007 at 05:06 PM New Product: 80:1 aspect ratio etched trenches reported on Applied’s Centura Mariana 1933
Apr 04, 2007 at 04:49 PM New Product: Novellus extends PECVD technology to the 45nm node with higher productivity 2238
Feb 08, 2007 at 06:13 PM New Product: KLA-Tencor’s Surfscan SP2XP has 30nm defect sensitivity 1960
Jan 05, 2007 at 02:18 PM New Product: Oxford Instruments provides new integrated TEOS solution for SiO2 PECVD 1972
Nov 28, 2006 at 10:06 AM New Product: SEZ’s ‘Esanti’ platform tackles 45nm volume production single wafer FEOL cleaning 2822
Nov 24, 2006 at 04:01 PM New Product: Synergy MPX tool from Rudolph with MMXRF extends opaque film analysis 2091
Nov 21, 2006 at 04:22 PM New Product: Varian Semiconductor’s ‘SuperScan’ corrects threshold voltage variability 1976
Nov 20, 2006 at 06:35 PM New Product: SensArray ‘Integral Wafer’ handles harsh environments at the 65nm node 1843
Nov 20, 2006 at 05:26 PM New Product: New selective nitride etch process from FSI reduces ultra-thin oxide damage 1986
Nov 14, 2006 at 02:01 PM New Product: Applied Materials’ Producer GT is productivity dream machine for fabs 2004
Oct 04, 2006 at 05:45 PM New Product: Low temp CVD offered for nickel silicide contacts by TEL 2298
 
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