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Home arrow Lithography arrow Product Briefings arrow Lithography
Lithography
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 Date Item Title Hits
Jul 15, 2008 at 11:05 AM New Product: PROLITH 11 from KLA-Tencor models double-patterning lithography 348
Jun 26, 2008 at 10:46 AM New Product: New e-beam resist from Dow Corning enables 6nm features 807
Jun 10, 2008 at 04:12 PM New Product: TSMC targets 32nm DFM requirements with a new unified design methodology 1277
Jun 05, 2008 at 02:41 PM New Product: Takumi’s ‘Enhance-RO’ now optimized for automated enforcement of recommended rules 1400
May 29, 2008 at 04:57 PM New Product: Xyalis’ GTmask suite supports multi-layer reticles and multi-project wafers 1473
May 08, 2008 at 04:54 PM New Product: Applied Materials’ ‘Tetra’ Reticle Clean reaches >99% particle removal efficiency 1864
Apr 15, 2008 at 10:28 AM New Product: Applied Materials’ ‘Aera2’ detects defects according to patterning impact 2263
Apr 14, 2008 at 03:30 PM New Product: Wafer Plane Inspection technology from KLA-Tencor addresses 32nm mask defect challenges 2247
Mar 13, 2008 at 04:46 PM New Product: Toppan Photomasks’ new DFM tool analyses defects and design errors 2891
Feb 25, 2008 at 05:47 PM New Product: Carl Zeiss SMT’s ‘PROVE’ handles mask pattern alignment and registration at 32nm node 2714
Feb 25, 2008 at 04:53 PM New Product: Molecular Imprints’ ‘Imprio’ 300 assists 32nm lithography R&D 2784
Feb 21, 2008 at 04:23 PM New Product: Agilent offers long-life DUV optical coatings 2592
Feb 21, 2008 at 04:07 PM New Product: Pixer enables high speed, high resolution DUV metrology of mask blanks 2334
Feb 13, 2008 at 03:34 PM New Product: KLA-Tencor tackles all reticle inspection needs for fabs with new TeraFab family 2741
Dec 10, 2007 at 05:56 PM New Product: Scanner Match Maker from KLA-Tencor and Nikon solve overlay errors in mixed strategies 3138
Dec 05, 2007 at 12:34 PM New Product: TOK and Dow Corning develop bilayer photoresist for sub-45nm DRAM production 2782
Dec 03, 2007 at 02:39 PM New Product: SOKUDO’s new RF3T system pushes 200wph throughput 2646
Nov 28, 2007 at 02:30 PM New Product: Cymer’s new ‘Gas Lifetime eXtension’ upgrade offers 10x better gas exchanges 2036
Sep 25, 2007 at 03:52 PM New Product: Pyxis’ NexusRoute auto router is DFM-aware and yield-driven 2309
Sep 19, 2007 at 04:37 PM New Product: Brion supports ASML’s Double Dipole Lithography technology 2417
Sep 13, 2007 at 04:00 PM New Product: Cymer’s 90W XLR 600i laser designed for immersion and Double Patterning 2156
Sep 11, 2007 at 04:28 PM New Product: Voltaire and Synopsys offer HPC for mask prep cycle-time reduction 1885
Aug 21, 2007 at 03:27 PM New Product: TEA Systems' Vector Raptor tackles Double Patterning overlay issues 2499
Aug 17, 2007 at 11:51 AM New Product: The ASML TWINSCAN XT:1000 KrF scanner handles 80nm features 2381
Aug 16, 2007 at 06:28 PM New Product: The Entegris Aeronex Gas Purification System handles immersion litho tools 2163
Aug 16, 2007 at 12:30 PM New Product: Nikon’s NSR-S310F scanner extends dry ArF beyond 65 nm 2175
Jul 10, 2007 at 05:04 PM New Product: Sokudo boosts speed of new RF3S track system by 20 percent 2232
Jun 12, 2007 at 03:18 PM New Product: Synopsys adds metrology data into OPC modeling 2043
Jun 05, 2007 at 12:52 PM New Product: Sagantec targets lithography hot spots with DFM-Fix 1894
May 30, 2007 at 03:13 PM New Product: KLA-Tencor goes Linux for OPC & RET requirements in new LithoWare release 1962
May 29, 2007 at 12:52 PM New Product: Brion adds Tachyon LAD to design flow assistance 2075
Apr 25, 2007 at 03:52 PM New Product: Carl Zeiss SMT’s MeRiT MG 45 handles all 45nm mask repairs 2102
Apr 19, 2007 at 02:28 PM New Product: New mask etcher from Applied Materials enables aggressive OPC techniques 2177
Mar 15, 2007 at 12:00 AM New Product: TeraScanHR inspection system handles complex reticles at the 45nm node 1886
Mar 13, 2007 at 05:31 PM New Product: Brewer Science’s ARC 160 cuts out-gassing problems 2015
Mar 12, 2007 at 03:25 PM New Product: Vistec offers photomask CD measurement down to 32nm 1920
Mar 12, 2007 at 11:52 AM New Product: Improved optical path enables 45nm mask metrology on the Vistec LMS IPRO4 1751
Feb 26, 2007 at 03:57 PM New Product: Timbre’s Profiler Application Server virtually eliminates downtime 1872
Feb 26, 2007 at 02:14 PM New Product: Brion accelerates Tachyon DFM capabilities for sub 45nm designs 1783
Feb 26, 2007 at 09:30 AM New Product: KLA-Tencor’s PROLITH 10 handles 32nm OPC effects 1879
Jan 05, 2007 at 02:02 PM New Product: Gigaphoton launches high NA laser light source for immersion tools 2149
Nov 29, 2006 at 08:05 PM New Product: Mentor Graphics offers Cell computing power for RET/OPC optimization 2607
Nov 29, 2006 at 07:00 PM New Product: Tokyo Electron boosts photoresist track system productivity with ‘LITHIUS Pro’ 3330
Nov 28, 2006 at 02:33 PM New Product: Takumi targets hot spot IC design issues with two new tools 2318
Nov 21, 2006 at 03:24 PM New Product: Nikon’s new NSR-SF150 i-line tool adopts wider exposure field 2893
Nov 02, 2006 at 06:08 PM New Product: GenISys new software speeds e-Beam lithography data-prep 2417
Oct 30, 2006 at 04:22 PM New Product: Advantest improves E-Beam tool for 65nm lithography applications 1836
Oct 18, 2006 at 12:38 PM New Product: Synopsys takes care of strain engineering in DFM 2916
Oct 10, 2006 at 03:05 PM New Product: PDF Solutions upgrades parametric yield analysis of analog and RF IC designs 2320
Sep 25, 2006 at 10:42 AM New Product: ASML’s ‘TWINSCAN’ XT:1900i near limit of immersion capabilities 3626
 
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