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300mm Report
Home arrow Product Briefings arrow Materials & Gases
Materials & Gases
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 Date Item Title Hits
May 14, 2008 at 12:58 PM New Product: Levitronix’s ‘BPS 600’ maglev pumps eliminate CMP slurry particle agglomeration 87
May 14, 2008 at 10:38 AM New Product: Edwards’ iXH vacuum pump series handles sub-60nm harsh process environments 76
Jan 31, 2008 at 05:10 PM New Product: VisionPad 5000 from Rohm and Haas reduces CMP scratch and chatter marks 2278
Dec 07, 2007 at 04:14 PM New Product: Post etch residue remover from Applied Chemical Laboratories cuts time and costs 3104
Sep 06, 2007 at 04:18 PM New Product: Tiger Optics’ new HALO+ CRDS analyzer covers widest dynamic range 2093
Aug 21, 2007 at 04:04 PM New Product: Cabot develops highly tunable B6600 barrier slurry for advanced Cu/low-k 2313
Aug 15, 2007 at 02:40 PM New Product: ORION Helium ion microscope from Carl Zeiss SMT breaks new ground in microscopy 2450
Jul 05, 2007 at 02:48 PM New Product: Ferro’s new ILD slurry eliminates reverse mask etch-back steps 1637
Jun 22, 2007 at 10:04 AM New Product: Ferro’s new formulated ceria slurry targets 65nm STI processes 1775
Jun 18, 2007 at 09:39 AM New Product: New tungsten slurries from Cabot combat edge-over-erosion 1793
Jun 01, 2007 at 02:55 PM New Product: BOC Edwards aims HELIOS 6 at high-flow gas abatement requirements 1968
Apr 19, 2007 at 01:02 PM New Product: ATMI’s RegenSi wafer reclaim offers shorter etch times for 300mm wafers 2715
Feb 19, 2007 at 05:44 PM New Product: Toshiba & partners use electrolyzed sulfuric acid for resist stripping 2216
Jan 04, 2007 at 03:02 PM New Product: Mallinckrodt Baker’s CLk-870 residue remover cuts process times 2417
Jan 04, 2007 at 02:49 PM New Product: CMP pad from Cabot offers improved pad life and performance repeatability 2436
Nov 24, 2006 at 12:29 PM New Product: MM-16 from HORIBA Jobin Yvon collects full spectral ellipsometric data 2063
Nov 24, 2006 at 10:59 AM New Product: Micro Photonics’ Sarfus visualization technology boosts microscope sensitivity 1855
Nov 24, 2006 at 10:16 AM New Product: Rohm and Haas offers improved defect reduction with new CMP pads 2324
Sep 25, 2006 at 10:22 AM New Product: Cost saving copper abatement for CMP tools offered by Metron 2112
Sep 19, 2006 at 06:14 PM New Product: Electroplated metals abatement from BOC Edwards manages waste 2083
Sep 12, 2006 at 04:38 PM New Product: High precision substrate-thickness metrology system launched by ISIS sentronics 1886
Aug 29, 2006 at 07:10 PM New Product: Compact LIQUOZON’ LoopO3 from MKS designed for single wafer cleaning tools 2002
Aug 18, 2006 at 11:28 AM New Product: ATMI launches dedicated copper chemistry solution for 45nm processes 2029
Aug 17, 2006 at 03:29 PM New Product: GES5 Evolution from Sopra covers UV to near Infra-Red spectrum 1369
Jun 07, 2006 at 05:05 PM New Product: Matera’s new automated SENTRY analyses harsh chemistries in fab 1773
May 24, 2006 at 03:38 PM New Product: Alternative to hydroxylamine based resist etch residue remover 2407
Nov 08, 2005 at 04:05 PM New Product: Accent Optical’s new Filmz FTIR offers wide range of plug & play applications. 2370
Sep 27, 2005 at 11:00 PM Internally heated pressure transducer for CVD & etch 3048
Sep 27, 2005 at 10:57 PM Point-of-use filter for subpart per billion levels 2913
Sep 27, 2005 at 10:22 PM Fine droplet liquid vaporizor system 3037
Sep 27, 2005 at 10:17 PM Fab-wide data analysis, storage and retrieval system for wafers 2922
Sep 26, 2005 at 12:00 AM New Product: Air Liquide launches R&D to production advanced precursors 2090
Feb 04, 2005 at 11:00 PM High-performance CMP slurry for STI 2951
Feb 04, 2005 at 10:00 PM Process transparent liquid chemical concentration system 2985
Feb 04, 2005 at 09:00 PM New filter for high-flow bulk gas applications 3192
Feb 04, 2005 at 08:00 PM Barrier slurry for low-stress/low-pressure CMP 2867
Feb 04, 2005 at 07:00 PM Germanium-free strained SOI wafers 2592
Feb 04, 2005 at 06:00 PM Ball valve aids system approach to piping system design 2571
 
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