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Home arrow Wafer Processing arrow Articles arrow Edition 23
Edition 23 - Published July 2004
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 Date Item Title Hits
Sep 21, 2004 at 12:57 PM 23rd Edition: Copper metallization for advanced interconnects: the electrochemical revolution 2755
Sep 21, 2004 at 12:55 PM 23rd Edition: Extraction and prediction of effective values for the 45-nm technology node 1869
Sep 21, 2004 at 12:51 PM 23rd Edition: Investigation of the fast removal of nano PSL and submicron silica 1885
Sep 21, 2004 at 12:40 PM 23rd Edition: Further optimization of plasma nitridation of ultra-thin oxides for 65-nm node MOSFETS 2087
Sep 21, 2004 at 12:19 PM 23rd Edition: High-k/metal gate transistor scaling and device concerns for advanced CMOS 2462
 
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