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Edition 24

Edition 24 - Published December 2004

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Dec 11, 2004 at 11:36 AM

24th Edition: Suppression of boron diffusion in Si and SiGe devices by fluorine implantation

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Dec 11, 2004 at 11:32 AM

24th Edition: X-ray metrology for front-end applications

2680

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Edition 25 - Published February 2005 ( 1 item )
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