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300mm Report
Home arrow News arrow Lithography
Lithography
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 Date Item Title Hits
Oct 17, 2007 at 05:21 PM IMEC to receive EUV pre-production tool from ASML in 2010 2076
Oct 16, 2007 at 01:02 PM Toshiba demonstrates 18nm isolated and 24nm dense features using imprint lithography 2139
Oct 12, 2007 at 02:56 PM EUV team responsible for Carl Zeiss SMT are nominated for ‘German Future Prize’ 1715
Oct 01, 2007 at 12:55 PM Tool Order: Gigaphoton’s GT61A ArF laser selected by Korean chip manufacturer 1861
Sep 19, 2007 at 05:53 PM Chartered Semiconductor validating Takumi’s DFM software for 65nm & 45nm 1869
Sep 18, 2007 at 07:16 PM Toppan Photomasks joins CEA-Leti led double patterning consortium 2023
Sep 18, 2007 at 06:55 PM Nikon and Synopsys adds Nikon exposure tool data to OPC solution 1531
Sep 17, 2007 at 05:58 PM Order Win: First deployment of Luminescent’s RET tool in U.S 1550
Sep 14, 2007 at 11:26 AM MAPPER Lithography first to demonstrate massively parallel electron beam writing 2205
Sep 14, 2007 at 10:55 AM Air Products sells OptiYield photoresist business to FUJIFILM 1460
Sep 13, 2007 at 12:21 PM ASML reaches new productivity milestone for i-line lithography tools 1880
Sep 13, 2007 at 11:08 AM Tool Order: Rohm and Haas purchases first Gamma XPress system from SUSS MicroTec 1707
Aug 22, 2007 at 06:01 PM Karlsruhe Nano Micro Facility starts using Vistec VB6 electron beam lithography system 1961
Aug 17, 2007 at 04:28 PM Clear Shape succumbs to advances from Cadence 1563
Aug 06, 2007 at 03:25 PM Toppan gains ‘World Class Supplier’ award from Spansion 1740
Aug 03, 2007 at 03:38 PM STARC adds Blaze DFM’s Halo product to 65nm design implementation 1521
Aug 01, 2007 at 05:59 PM Photronics hit by semiconductor upheavals in Europe 1856
Jul 23, 2007 at 04:44 PM Tool Order: NAND flash customer receives first XT:1900i from ASML 1695
Jul 18, 2007 at 09:01 AM Litho shrinks and links 1994
Jul 12, 2007 at 02:42 PM Cadence acquires DFM specialist Invarium 2020
Jul 11, 2007 at 04:45 PM Cadence teams with STARC on 65nm DFM issues 1601
Jul 11, 2007 at 04:02 PM Applied invests in chip printing start-up 1778
Jul 03, 2007 at 03:16 PM Toppan Photomasks awarded “Supplier of the Year” title at X-FAB 1591
Jun 29, 2007 at 02:33 PM Memory glut hits lithography tool shipments 2568
Jun 29, 2007 at 11:14 AM Gigaphoton reaches 500th excimer laser installation 1878
Jun 26, 2007 at 04:24 PM Rohm and Haas Electronic Materials invests US$60 million in immersion litho tool set 1863
Jun 22, 2007 at 12:47 PM Vistec named AMTC Supplier of the Year 1620
Jun 15, 2007 at 01:42 PM CNT in Dresden to use e-beam system from Vistec for 32nm IC R&D 1715
Jun 13, 2007 at 03:01 PM Tool Order: NexTech’s reticle inspection tool accepted by major chip manufacturer 1581
Jun 11, 2007 at 02:15 PM New development partnership focuses on 10nm e-beam capabilities 1676
Jun 06, 2007 at 05:44 PM SPIE changes name to SPIE! 1506
Jun 06, 2007 at 03:45 PM Rohm and Haas opens lithography R&D center in Korea 1893
Jun 05, 2007 at 04:19 PM Tool Order: Akrion books photomask cleaning tool order 1406
Jun 01, 2007 at 01:53 PM STMicroelectronics to use Clear Shape for 65nm DFM requirements 1888
May 24, 2007 at 04:48 PM STARC to use Brion’s DFM workflow solutions for 65nm designs 1946
May 24, 2007 at 04:40 PM SEMATECH selects Carl Zeiss SMT’s mask metrology technology for R&D work 2248
May 02, 2007 at 05:32 PM SEMATECH gives $700k funding for novel double patterning resists 2253
Apr 23, 2007 at 02:40 PM Veeco receives further funding from SEMATECH for EUV mask tools 2173
Apr 19, 2007 at 06:07 PM Double patterning a necessity in bridging gap to EUV, says ASML 2509
Apr 18, 2007 at 04:28 PM Synopsys and NanoGeometry team on OPC modeling 2019
Apr 17, 2007 at 04:28 PM KLA-Tencor’s TeraScanHR mask inspection system installed at Toppan Printing 2065
Apr 16, 2007 at 02:43 PM Order Win: Invarium’s OPC technology selected by semiconductor OEM 2087
Apr 12, 2007 at 03:09 PM Second U.S. patent issued to Luminescent for inverse litho technology 1884
Apr 12, 2007 at 12:34 PM SEMATECH successful in removing 10nm particles from EUV mask blanks 2396
Apr 12, 2007 at 12:24 PM KLA-Tencor and Clear Shape team on mask yield issues 1715
Apr 10, 2007 at 05:27 PM Clear Shape and Lightspeed Logic team on litho-related variability issues 1604
Mar 30, 2007 at 03:02 PM Toppan photomasks receives “Best Partner” award from Samsung 1692
Mar 13, 2007 at 10:01 AM Doubling up for more than twice the EUV output 1881
Mar 09, 2007 at 02:21 PM SEMATECH cautious over novel materials to extend immersion lithography 2255
Mar 08, 2007 at 04:16 PM ASML closes Brion Technologies acquisition 2271
 
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