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Home arrow News arrow Lithography
Lithography
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 Date Item Title Hits
May 14, 2008 at 09:31 PM EV Group goes direct in South Korea as demand rises 320
May 14, 2008 at 08:57 PM Cymer touts 100 watts average power in time for 2009 production ready EUV tools 408
May 13, 2008 at 03:26 PM Shanghai Hua Hong NEC selects Anchor Semiconductor’s DFM tools for sub-130nm 423
Apr 28, 2008 at 02:26 PM Analog Devices honors Photronics with Supplier Excellence Award 1029
Apr 24, 2008 at 10:03 AM Carl Zeiss SMT moves to new headquarters 1046
Apr 23, 2008 at 12:52 PM POWERLASE receives Queen’s Award for Enterprise 863
Apr 22, 2008 at 09:59 AM Cymer installs 90W XLR laser system at Nikon 963
Apr 22, 2008 at 09:53 AM Milestone: ASML reaches 1000th shipped KrF lithography system 812
Apr 17, 2008 at 03:49 PM Model-based mask verification used to optimize 45nm RET and OPC strategies 866
Apr 17, 2008 at 03:46 PM Blaze DFM grants TSMC exclusive deal on leakage power reduction technology 830
Apr 14, 2008 at 06:30 PM Milestone: Gigaphoton installs 100th ArF light source 888
Apr 10, 2008 at 03:19 PM POWERLASE to supply DPSS lasers to EUVA 1031
Mar 31, 2008 at 05:03 PM Toshiba and Ponte team on via and contact etch DFM project 1061
Mar 27, 2008 at 03:34 PM STMicroelectronics to use Tachyon OPC+ for 45nm production 1564
Mar 18, 2008 at 05:55 PM ASML strengthens position as top lithography supplier 1829
Mar 12, 2008 at 04:34 PM Vistec Semiconductor highlights EUV mask registration metrology results 1411
Mar 07, 2008 at 03:09 PM Tool Order: GenISys adds more research labs to Layout BEAMER software 1213
Feb 27, 2008 at 09:58 PM Tool Order: SEMATECH buys Imprio 300 imprint lithography tool from Molecular Imprints 1675
Feb 27, 2008 at 04:33 PM Tool Order: Gigaphoton ships first GT62A 90W laser 1427
Feb 27, 2008 at 04:24 PM AMD and IBM successfully produce first EUV ‘full-field' test chip 2639
Feb 27, 2008 at 02:31 PM Nova’s 3090Next CD metrology system integrated into Sokudo’s RF3 track system 1142
Feb 25, 2008 at 04:41 PM IBM taps Rohm and Haas for implant and lithography materials development 1317
Feb 21, 2008 at 02:33 PM Spansion to use Sokudo's RF3S track for 32nm immersion development 1277
Feb 21, 2008 at 02:06 PM Toshiba uses Brion’s Tachyon OPC+ for 45nm logic devices 1009
Feb 20, 2008 at 06:50 PM Nikon to ship double patterning immersion tools in Q408 1157
Feb 20, 2008 at 05:53 PM Tool milestone: Cymer ships 100th XLA 6kHz laser 904
Feb 11, 2008 at 03:28 PM SEMATECH demonstrates defect density of 0.04/cm2 for EUV mask blanks 1108
Jan 29, 2008 at 01:33 PM IMEC attracts Powerchip to advanced lithography and memory program 1062
Jan 22, 2008 at 02:13 PM Tool Order: NEC using Brion’s Tachyon OPC+ for 40nm designs 1117
Jan 21, 2008 at 06:05 PM IMEC & CNSE share EUV lithography work 1291
Jan 16, 2008 at 06:09 PM Tool Order: CSR opts for Ponte Solutions’ YA System for DFM analysis 1081
Jan 16, 2008 at 03:32 PM Immersion lithography makes big splash with DRAM manufacturers 2121
Jan 04, 2008 at 11:03 AM Si2 welcomes five new members to DFM Coalition 1353
Dec 24, 2007 at 06:53 PM ASML, Carl Zeiss and Canon ink IP license 1587
Dec 03, 2007 at 10:48 AM Cymer sets new EUV lithography laser power milestone 1645
Nov 30, 2007 at 04:21 PM Nikon gains new customers for its immersion lithography tools 1701
Nov 02, 2007 at 02:34 PM Lithography market to top $14.5 billion by 2012 1931
Oct 30, 2007 at 02:41 PM Tool Order: Micronic gets repeat business from Asian-based customer 1336
Oct 29, 2007 at 04:53 PM Cymer campus unscathed by San Diego fires 1396
Oct 19, 2007 at 04:05 PM Toshiba using Nikon’s S610C immersion tool for 43nm in Fab 3 in 2Q08 1993
Oct 17, 2007 at 05:21 PM IMEC to receive EUV pre-production tool from ASML in 2010 1795
Oct 16, 2007 at 01:02 PM Toshiba demonstrates 18nm isolated and 24nm dense features using imprint lithography 1819
Oct 12, 2007 at 02:56 PM EUV team responsible for Carl Zeiss SMT are nominated for ‘German Future Prize’ 1478
Oct 01, 2007 at 12:55 PM Tool Order: Gigaphoton’s GT61A ArF laser selected by Korean chip manufacturer 1568
Sep 19, 2007 at 05:53 PM Chartered Semiconductor validating Takumi’s DFM software for 65nm & 45nm 1588
Sep 18, 2007 at 07:16 PM Toppan Photomasks joins CEA-Leti led double patterning consortium 1694
Sep 18, 2007 at 06:55 PM Nikon and Synopsys adds Nikon exposure tool data to OPC solution 1352
Sep 17, 2007 at 05:58 PM Order Win: First deployment of Luminescent’s RET tool in U.S 1320
Sep 14, 2007 at 11:26 AM MAPPER Lithography first to demonstrate massively parallel electron beam writing 1933
Sep 14, 2007 at 10:55 AM Air Products sells OptiYield photoresist business to FUJIFILM 1246
 
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