Product Briefing Outline: Nanometrics has released its NanoCD Suite, which is composed of four key optical critical dimension (OCD) metrology solutions: NanoGen; NanoMatch; NanoStation and NanoDiffract. When NanoCD Suite is combined with its Atlas standalone and 9010 integrated metrology systems, it provides a complete OCD solution that can measure and model all 45nm and smaller devices, including scribe line process control targets and advanced die structures, as well as advanced R&D structures for 32nm and 22nm nodes, providing the necessary metrology for critical process control. 

Product Briefing Outline: Rohm and Haas Electronic Materials’ CMPTechnologies division has introduced the ‘VisionPad’ 5000 CMP pad, specifically designed for defectivity reduction in shallow trench isolation (STI) and interlayer dielectric (ILD) applications. The new pad targets volume manufacturing of memory and logic chips at 65nm and below. 

Product Briefing Outline: Rohm and Haas Electronic Materials’ CMPTechnologies division has introduced the ‘VisionPad’ 5000 CMP pad, specifically designed for defectivity reduction in shallow trench isolation (STI) and interlayer dielectric (ILD) applications. The new pad targets volume manufacturing of memory and logic chips at 65nm and below.