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Critical Components News   RSS Feed
VLSI Research lists Top Ten critical subsystems suppliers for 2007  12 May 2008
Swagelok acquires semiconductor hose specialist Coreflex  16 Apr 2008
BASF Names Swagelok as a Global Preferred A-Supplier   02 Apr 2008
Entegris buys into poly silicon products company IMI  06 Mar 2008
Asyst offers 64-bit implementation of SECS/GEM tool connectivity products  28 Jan 2008
Dutch conglomerate acquires Integrated Dynamics Engineering  08 Jan 2008
Emerson sells Brooks Instrument to private equity firm for $100 million  04 Jan 2008
Tokyo Electron teams with Integrated Materials on furnace consumables  30 Nov 2007
Applied Materials concludes Kachina purchase  12 Nov 2007
Critical Components Product Briefs   RSS Feed
New Product: Nexen’s Roller Pinion System handles long run linear motion control  13 Mar 2008
Product Briefing Outline: A unique Roller Pinion System (RPS) from Nexen Group, Inc., allows machine designers to incorporate highly accurate linear and rotary motion-control functions with zero backlash and speeds  Read More
New Product: Entegris offers ‘Torrento’ high-flow liquid filters for wet etch and clean processes  17 Dec 2007
Product Briefing Outline: Entegris has introduced the new Torrento family of high-flow liquid filters that help improve liquid contamination control of nano-scale particles in wet etch and clean (WEC) manufacturing  Read More
New Product: Aerotech’s WaferMax T rotary stage offers form factor benefits   13 Dec 2007
Product Briefing Outline: Aerotech’s WaferMax T rotary stage was originally designed for the demands of precision wafer inspection; however, due to its low height design it can be used in  Read More
Critical Components
The Critical Components & Sub-Systems section acknowledges the growing contribution of innovations in this field that can have a significant benefit to wafer tool performance, fab operations and technology targets. A broad range of topics are covered that can cover the latest vacuum pump technology for 300mm fabs to the latest developments in precursor gas valve's for Atomic Level Deposition (ALD).


18th Edition: Suppliers of critical subsystems make significant contributions to productivity and... Print E-mail
Mar 21, 2003 at 02:48 PM

John West, VLSI Research

ABSTRACT

In recent years equipment manufacturers have increasingly looked to their supply base for the design and engineering of subsystems and components for their products. At the same time we’ve seen the end users of equipment also taking advantage of these companies’ expertise to improve the productivity and performance of their installed tools. Both these trends have contributed to the subsystem industry’s raised profile beyond that of mere suppliers of components. 

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18th Edition: Advanced technologies in CMP slurry systems reduce wafer damage Print E-mail
Mar 21, 2003 at 02:41 PM

Scott Robichaud & Katsuhiro Ohnishi, Asahi

ABSTRACT

Chemical Mechanical Planarization (CMP) slurry systems have created many new challenges in the semiconductor fabrication industry.
Certain types of CMP slurries consisting of suspended solids in solution are abrasive, and traditional components used in wet process
systems, such as diaphragm valves, can damage these slurries.

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