Evonik Industries AG and BASF have announced a joint development program for next-generation CMP slurries, targeting shallow trench isolation (STI) and inter-layer dielectric (ILD) processes. Evonik is to provide various grades of cerium oxide to be used with BASF’s slurry chemistry.

Siltronic Samsung Wafer Pte. Ltd., the joint venture of Samsung Electronics Co. Ltd. and Siltronic AG, has begun 300mm wafer production at a newly commissioned US$1 billion facility in Singapore. The JV, which was completed in 18 months, is expected to produce 300,000 wafers and to generate over 800 jobs by 2010. 

Hynix Semiconductor has expanded bulk gas supply contracts with Air Liquide Electronics at its new 300mm fab located in Cheongju, South Korea and its joint venture 300mm fab in Wuxi, China. 

Voltaix LLC has announced that due to increased demand for germane from both the semiconductor and solar industries, it plans to expand production of the compound. The expansion will include the completion of the installation of a previously constructed skid-mounted site, the location of which was not disclosed by the company. 

Strong growth in the industrial gases market has led to Air Liquide pouring €110 million into an expansion program. The company will open production facilities in Ulm, southern Germany, and Sines, southwest Portugal, with initial production expected between the end of 2009 and early 2010. 

According to the SEMI Silicon Manufacturers’ Group (SMG), worldwide silicon wafer area shipments declined 1 percent in 1Q08 compared to 4Q07. Total silicon wafer area shipments were 2,163 million square inches in the first quarter, compared to 2,185 million square inches shipped during the fourth quarter. Compared to the 2007 first quarter, total area shipments increased by 3 percent. 

A collaboration between IBM and Matheson Tri-Gas, a subsidiary of Taiyo Nippon Sanso, Japan, has been signed to develop high purity gas molecules and new delivery systems for the 32nm node and below using atomic level deposition (ALD) techniques.