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Lithography News
Tool Order: NEC using Brion’s Tachyon OPC+ for 40nm designs Print E-mail
Jan 22, 2008 at 02:13 PM

ImageNEC Electronics has placed a significant order for Brion’s Tachyon OPC+ optical proximity correction (OPC) product that will be used for 40nm designs. NEC had previously used Brion’s Tachyon RDI lithography simulation and design inspection system for 65nm designs. 

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IMEC & CNSE share EUV lithography work Print E-mail
Jan 21, 2008 at 06:05 PM
CNSEAs concern builds on the commercial viability of EUV lithography, the two R&D centers currently utilizing Alpha tools from ASML will now collaborate on advanced imaging capabilities and a range of equipment development technologies and undertake research on the understanding of new materials.Write Comment (2 comments)
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Tool Order: CSR opts for Ponte Solutions’ YA System for DFM analysis Print E-mail
Jan 16, 2008 at 06:09 PM

ImageWireless silicon technology provider CSR has announced that it has selected Ponte Solutions’ YA System for performing DFM analysis on the company’s semiconductor designs, thereby aiding in CSR’s move to 65nm processes. 

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Immersion lithography makes big splash with DRAM manufacturers Print E-mail
Jan 16, 2008 at 03:32 PM

ImageThe aggressive node migrations seen at NAND flash memory manufacturers as they attempt to reduce production costs to keep pace with falling ASPs has been a boon for lithography tool suppliers ASML and Nikon with respect to increasing adoption of immersion lithography technology at the sub-60nm nodes. 

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Si2 welcomes five new members to DFM Coalition Print E-mail
Jan 04, 2008 at 11:03 AM

ImageSilicon Integration Initiative (Si2) has announced that five new members have joined the Si2 ranks to strengthen the coalition’s aim to ensure the adherence of the IC manufacturing process to the original intended design of the IC. 

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ASML, Carl Zeiss and Canon ink IP license Print E-mail
Dec 24, 2007 at 06:53 PM
ASMLA global cross-license of patents in their respective fields of semiconductor lithography and optical components has been signed between ASML, Carl Zeiss and Canon. The move was said to enable the ‘three companies to compete more freely in the area relevant to their customers, which is technology expertise and implementation, rather than on intellectual property (IP) rights.’Write Comment (0 comments)
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Cymer sets new EUV lithography laser power milestone Print E-mail
Dec 03, 2007 at 10:48 AM

CymerCymer has said that it demonstrated new burst peak power figures for its laser produced plasma (LPP) system using a multi-staged carbon dioxide (CO2) laser and tin (Sn) droplet target. At the recently held 2007 International EUVL Symposium in Sapporo, Japan, Cymer reached its initial goal of demonstrating 100 watts of extreme ultraviolet (EUV) burst power. 

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Nikon gains new customers for its immersion lithography tools Print E-mail
Nov 30, 2007 at 04:21 PM

NSR-S610CNikon Corporation has said that its volume production immersion tool - the NSR-S610C - has gained new customer wins in 2007 after the successful adoption and ramp of 56nm NAND flash, believed to be with long-standing customer Toshiba Corp. 

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Lithography market to top $14.5 billion by 2012 Print E-mail
Nov 02, 2007 at 02:34 PM

ImageASML has said that it believes the semiconductor lithography market could reach approximately $14.5 billion by 2012 with it taking a 50 percent share with revenues close to $7.2 billion by that year. The projection was made at an investor conference in London, England. 

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Tool Order: Micronic gets repeat business from Asian-based customer Print E-mail
Oct 30, 2007 at 02:41 PM

OmegaAn Asian-based customer has placed a repeat order with Micronic Laser Systems for an advanced Omega series laser pattern generator for photomask making for semiconductor applications. The system is scheduled for delivery in December 2007. 

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