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Lithography News
SMIC to spend 85 million euros on lithography tools Print E-mail
Dec 14, 2005 at 04:38 PM
Semiconductor Manufacturing International Corporation (has entered into a long-term loan facility agreement with ABN AMRO Bank N.V. and Commerz bank (Nederland) N.V. to the tune of 85 million euros. SMIC stated that the funds would be used to purchase lithography tools. ASML is SMIC's lithography tool supplier.Write Comment (0 comments)
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TEL and IMEC continue advanced lithography development program Print E-mail
Dec 13, 2005 at 01:01 AM
Tokyo Electron has extended research into advanced lithography technologies with IMEC as part of IMEC's Industrial Affiliation Program on EUV lithography. TEL will provide a new photoresist coater/developer tool in January 2006 with the program expected to run for three years.Write Comment (0 comments)
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EUV power source boosts watts Print E-mail
Dec 09, 2005 at 02:12 PM
XTREME technologies GmbH as part of a EU funded project to develop a light source for EUV lithography has claimed a proof-of-principle experiment that has taken light source wattage from 120 to 800 watts. The general perceived target for EUVL to become a mainstream manufacturing image technology is around 1 kilowatt.Write Comment (0 comments)
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Photronics and Micron discuss joint work for 2006 Print E-mail
Dec 07, 2005 at 03:52 PM

By Dr Mike Cooke

Photronics is in talks with Micron Technology to jointly develop advanced reticle technologies for the 45nm node. The work would focus on mask technology for both bit cell and logic applications starting at the ITRS 45nm logic node.

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First EUV masks shipped from AMTC Print E-mail
Dec 02, 2005 at 04:46 PM
The Advanced Mask Technology Center (AMTC) based in Dresden, Germany has shipped the first EUV masks for ASML's EUV alpha tool, highlighting the latest milestone in developing the infrastructure for the possible adoption of the lithography technology for designs at 32nm half-pitch dimensions in the 2010-2012 timeframe.Write Comment (0 comments)
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Tool Order: Nankai University, China purchases a DWL66 Maskless Lithography System from Heidelberg I Print E-mail
Nov 28, 2005 at 07:25 PM
Nankai University Center for Optics Research, located in Tianjin, China has purchased a
DWL66 maskless lithography system from Heidelberg Instruments. The DWL66 is capable of producing patterns down to 0.6 microns, and is equipped with the capability of thick resist and grey scale exposure, in addition to metrology, front to backside and layer to layer alignment.Write Comment (0 comments)
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SMIC gets 85m euro loan to spend with European tool suppliers Print E-mail
Nov 21, 2005 at 04:13 PM
Semiconductor Manufacturing International Corp (SMIC) has been granted an 85 million Euro loan from an unidentified European bank, according to news reports from Hong Kong and mainland China.Write Comment (0 comments)
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Cymer expects explosion in immersion light source sales in 2006 Print E-mail
Nov 09, 2005 at 06:43 PM
Cymer highlighted during its annual analyst day conference yesterday that immersion specific ArF laser light source sales would increase dramatically in 2006 and 2007. The company also announced yesterday that it had shipped its first XLA 300, the world's first 6kiloHertz (kHz), 193nm, argon fluoride (ArF) light source, specifically designed for immersion lithography tools.Write Comment (0 comments)
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First production immersion 6 kHz Light Source shipped by Cymer Print E-mail
Nov 09, 2005 at 01:50 PM
Cymer, Inc has shipped the first 6kiloHertz (kHz), 193nm, argon fluoride (ArF) light source intended for immersion lithography production tools to an unspecified customer, according to the company.Write Comment (0 comments)
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Tool Orders: Advance Reproductions places repeat order with Micronic Laser Print E-mail
Nov 03, 2005 at 04:43 PM
Advance Reproductions Corp, a photomask manufacturer in North Andover, Mass has placed a repeat order with Micronic Laser Systems AB for its MP80-series laser pattern generator. This is the third purchase of a Micronic laser pattern generator for Advance Reproductions since 1997, according to Micronic.Write Comment (0 comments)
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