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Lithography News
XTREME EUV light source program gets cash boost from Intel Print E-mail
Jan 30, 2006 at 08:50 AM
Intel GuyIntel Corporation has via its venture capital arm invested an undisclosed sum in XTREME technologies GmbH a joint venture between JENOPTIK AG and USHIO Inc to boost the development cycle of its 13.5nm light source.Write Comment (0 comments)
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IBM acquires lithography APC software business from Inficon Print E-mail
Jan 27, 2006 at 10:15 PM
Applied MaterialsIBM has acquired Inficon's advanced process control software IP for advanced lithography tool applications. The technology was originally developed by New Vision Systems, which was acquired by Inficon in 2003. IBM and Intel had both been users of the software.Write Comment (0 comments)
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New Orders: Major memory IC manufacturer places large KrF laser replacement order with Cymer Print E-mail
Jan 27, 2006 at 02:19 PM

CymerA leading memory-device manufacturer has placed a large order with Cymer to replace competitors 27 incumbent laser light systems currently in volume production use. The program to replace the systems is expected to start in the first quarter 06 and take the duration of the year to complete, so that production is not disrupted.

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ASML could ship more than 25 immersion lithography tools in 06! Print E-mail
Jan 18, 2006 at 04:47 PM
ASMLASML highlighted during a press and analyst conference call today that covered the company's fourth quarter financial results that it could eventually ship more immersion tools than the guidance given.Write Comment (0 comments)
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Tool Orders: TOK America selects MC600 defect inspection tool from Sela Print E-mail
Jan 10, 2006 at 04:00 PM
TOK America has selected the MC600 defect inspection tool from Sela to provide "tool matching" analysis on photoresist samples to customers. The tool has already been delivered to the TOK America facility in Hillsboro, Oregon.
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Photronics plans advanced photomask facility in Korea Print E-mail
Jan 10, 2006 at 02:45 PM
Photronics has said it is in the final stages of the site selection process for a new photomask fabrication facility in Korea that will produce masks for the 65nm, 45nm and 32nm nodes in the second half of 2007.
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Tool Orders: Toshiba first to use Sigma-C DFM software Print E-mail
Jan 09, 2006 at 06:39 PM
Toshiba Corporation Semiconductor Company, has deployed SOLID+, a patented micro-lithography lithography simulation/image verification tool for DFM applications from SIGMA-C Software AG.Write Comment (0 comments)
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Tool Orders: AMD selects Accent Optical's overlay metrology tool at Fab 36 Print E-mail
Jan 09, 2006 at 06:19 PM

AMD has selected and deployed Accent Optical Technologies "Caliper élan" 300mm overlay tool in AMD's new Fab 36 production facility in Dresden, Germany. The tool will be used for both 90nm and 65nm tool-to-tool matching applications for the Athlon 64 and next generation devices.

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IM Flash Technologies to buy all lithography tools from ASML Print E-mail
Jan 06, 2006 at 07:20 PM
The recently formed NAND Flash joint venture IM Flash Technologies, between Intel Corp and Micron Technology Inc., is expected to order all lithography tool requirements that include critical and non-critical imaging layers from ASML, according to a research note issued today by Titus Menzies, a financial analyst with Jeffries International, based in London England.

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Tool Orders: University of Massachusetts orders a nano-imprint tool from Molecular Imprints Print E-mail
Jan 03, 2006 at 05:41 PM
The University of Massachusetts Amherst has ordered an "Imprio" 55 Step and Flash nano-imprint lithography instrument from Molecular Imprints, Inc as part of a new nano-lab being established at the campus. Delivery and installation of the new equipment is expected by spring 2006.Write Comment (0 comments)
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