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Lithography News
One customer made up 24 percent of sales at ASML in 2005 Print E-mail
Mar 10, 2006 at 04:37 PM
ASMLIn ASML's new annual report for 2005 the company noted to investors that one customer that year had spent 609 million Euros on lithography tools with the company making up 24 percent of net sales!Write Comment (0 comments)
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UMC's manufacturing designs on 90nm system chips Print E-mail
Mar 01, 2006 at 02:34 PM
UMCUMC announced its 'design for manufacturing' (DFM), yield optimisation package for customers developing 90nm systems on chip (SoCs), incorporating DFM elements into standard-cell libraries, SPICE models and design flows. This is designed to provide users with yield-enhancing knowledge throughout design and manufacturing.

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Tool Order: Major Asian IC Manufacturer orders first Sigma7500 mask writer from Micronic Print E-mail
Mar 01, 2006 at 09:30 AM
Sigma 7300A Major Asian IC Manufacturer has placed its first order with Micronic Laser Systems for a Sigma7500 mask writing tool, Micronic's most advanced production system.Write Comment (0 comments)
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ASML immersion tool hits 42nm resolution Print E-mail
Feb 22, 2006 at 05:27 PM
ASMLASML presented images down to 42nm at the SPIE Microlithography meeting in San Jose, California. The 42nm dense lines, 84nm pitch patterns were printed on the ASML TWINSCAN XT:1700i system. Depth of focus was 1micron and the field size 26x33mm. In addition, ASML presented proof-of-concept 35nm images from its Extreme Ultra Violet (EUV) Alpha-Demo Tool (ADT).
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Immersion works at near-zero defects, according to TSMC Print E-mail
Feb 22, 2006 at 02:04 PM
TSMCWorld-leading foundry TSMC claims that its immersion lithography is nearly production ready and that this has been achieved with proprietary techniques that produce near-zero defect rates. The company's immersion lithography programme has produced test wafers well within acceptable parameters for volume manufacturing, it adds. TSMC researchers will present their results at the SPIE Microlithography Conference in San Jose, California.Write Comment (0 comments)
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Cymer’s light source spectra data used to improve KLA-Tencor tool Print E-mail
Feb 22, 2006 at 10:25 AM
CymerCymer will provide details of its lithography light source spectra to be incorporated into KLA-Tencor's PROLITH lithography optimisation tool. In addition, the companies expect to continue to jointly develop enhancements to this capability for future PROLITH revisions.
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Brion moves in on OPC implementation market Print E-mail
Feb 21, 2006 at 04:41 PM
Brion Brion Technologies introduced Tachyon OPC+ aimed at accurate and predictable optical proximity correction (OPC) features on sub-65nm device designs without sacrificing speed or cost of ownership. Brion already supplies OPC modelling and verification technologies. Tachyon OPC+ now supplies implementation as well and is currently in beta evaluation and production flow integration at Brion's existing customer base.
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IBM focuses in on sub-32nm optical litho Print E-mail
Feb 20, 2006 at 01:59 PM
IBMIBM scientists claim the smallest, high-quality line patterns ever made using deep-ultraviolet (DUV, 193nm) optical lithography - immersion-style, of course, but with a high index liquid rather than water. The distinct, uniformly-spaced 29.9nm ridges beat the one-time industry consensus limit for optical litho of 32nm, after which some other technology such as extreme ultraviolet (EUV, 13nm) radiation would have to be introduced and qualified.
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Mentor Graphics says compressive mask data tool verified by IDM’s for 45nm node Print E-mail
Feb 16, 2006 at 05:27 PM

Mentor GraphicsMentor Graphics has stated that multiple integrated device manufacturers (IDMs) have qualified its "Calibre MDP," software that compresses mask data files for all types of mask writing tools to speed up writing times. It supports all mask writer formats: MEBES, JEOL, Toshiba/NuFlare, Hitachi and Micronic.

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Tool Orders: Nikon ships production immersion tool to Toshiba Print E-mail
Feb 16, 2006 at 03:50 PM
NikonA major semiconductor IC manufacturer has received delivery of Nikon's first production ready immersion lithography tool, the NSR-S609B with a hyper-NA projection lens of NA 1.07. It has been widely known for some time that Toshiba would be the first customer to receive the tool as part of its plans to continue to aggressively scale its NAND Flash devices. The tool is expected to enter production in 2007.Write Comment (0 comments)
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