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Lithography News
Double exposure immersion lithography cost complaints Print E-mail
May 26, 2006 at 11:43 AM
Immersion LithographyThe most recent SEMATECH-led Litho Forum, an invite only event for around 100 of the top lithography experts in the semiconductor industry are reported to have confirmed that they expect 193nm ArF immersion lithography to pattern critical layers at the 45nm half-pitch node in 2009 as well as continue at the 32nm half-pitch 2012.Write Comment (0 comments)
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Search for better immersion photoresists goes down under! Print E-mail
May 25, 2006 at 05:16 PM
Semiconductor FabtechSEMATECH assignees are to collaborate with the University of Queensland, Australia on a new project to seek out new high-refractive-index polymers for 193nm photoresists in an effort to extend immersion lithography to the 32nm node.Write Comment (0 comments)
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Update:ASML ups lithography bookings guidance by 40 percent for quarter Print E-mail
May 23, 2006 at 10:24 AM
ASMLUpdate:ASML has increased its bookings guidance for its 2Q06 by at least 40 percent compared to 1Q06. Bookings for the last quarter reached 62 lithography tools meaning the company now expects to book around 87 tool orders in the current quarter.Write Comment (0 comments)
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TSMC puts together designers DFM tool kit for 65nm devices Print E-mail
May 15, 2006 at 02:11 PM
TSMC Fab12Taiwan Semiconductor Manufacturing Company (TSMC) has assembled a 65nm DFM Compliance Design Support Ecosystem that is intended to enable IC designers to use the same DFM data file irrespective of the tool or vendor.
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Nikon to sell 9 lithography immersion tools in 2006/7FY Print E-mail
May 15, 2006 at 01:43 PM
NikonNikon has revealed that it is projecting to investors that it will sell nine 193nmArF immersion tools in its coming financial year. Overall Nikon is projecting new lithography tool unit sales will top 170, up from 159 for the financial year just finished.
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UPDATE: Applied Materials enters photoresist track market with Dainippon Screen partnership Print E-mail
May 15, 2006 at 11:50 AM
JVApplied Materials and Dainippon Screen Mfg Co., (DNS) have formed a joint venture company that will be dedicated to photoresist track develop processes and tools. The JV will be called Sokudo Co., Ltd with DNS owning 52 percent and  Materials owning 48 percent. The company will be headquartered in Kyoto, Japan.Write Comment (0 comments)
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Photronics and Micron establish JV, set to build new photomask facility Print E-mail
May 08, 2006 at 02:52 PM
MicronPhotronics and Micron Technology have formed a new Joint Venture (JV) business called MP Mask Technology Center, LLC to develop and manufacture Micron's range of products as well as allow Photronics to leverage its investment for use by other customers. Micron will own 50.01 percent of the new JV, while Photronics will own 49.99 percent of the new enterprise.Write Comment (0 comments)
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ASML to ship 70 immersion lithography tools by end of 2007! Print E-mail
Apr 20, 2006 at 07:42 AM
ASMLASML has stated that it expects to have shipped 70 193nm ArF immersion lithography tools by the end of 2007, giving the company around a 70 percent market share in the technology, according to Eric Maurice, President and CEO of ASML, during a conference call with financial analysts to discuss 1Q06 results.Write Comment (0 comments)
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Tool Orders: Renesas buys multiple OPC verification systems from Brion Technologies Print E-mail
Apr 18, 2006 at 11:56 AM
BrionRenesas Technology Corp has ordered multiple ‘Tachyon' RDI lithography simulation and design inspection systems from Brion Technologies as part of its strategy to introduce IC devices at the 65nm node in faster time-to-production than previous nodes.Write Comment (0 comments)
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Tool Orders: Sony selects Synopsys' phase shift mask software for 65nm node Print E-mail
Apr 18, 2006 at 10:12 AM
AA-PSMSony Corporation has adopted Synopsys' alternating aperture phase-shift mask (AA-PSM) technology to enhance manufacturability of its advanced logic chips that includes the ramp of the ‘Cell' microprocessor that will be used in the PS3 gaming console.Write Comment (0 comments)
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