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Lithography News
Tool Order: Matsushita uses Mentor Graphics Calibre OPCverify for 65nm devices Print E-mail
Sep 19, 2006 at 01:14 PM

ImageMatsushita Electric Industrial Co has selected Mentor Graphics' ‘Calibre' OPCverify tool for RET verification of masks used for production at the 65nm node.
"Verification of post-OPC output is critical to minimizing mask respins of million dollar mask sets, and avoiding time-to-market delays," said Hiroyuki Tsujikawa, Semiconductor Company, Matsushita Electric Industrial Co., Ltd.

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Fujitsu and Advantest form E-Beam lithography & process prototype foundry service Print E-mail
Sep 15, 2006 at 11:38 AM
Fujitsu and Advantest Fujitsu Limited and Advantest Corporation are planning to form a Joint Venture prototype foundry shuttle service that will initially offer 65nm processes from Fujitsu and use Electron Beam Direct Write (EBDW) lithography developed and manufactured by Advantest in the second quarter of 2007.Write Comment (0 comments)
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Buried EUV mask blank defects now detectible Print E-mail
Sep 06, 2006 at 02:06 PM
Defects now detectible Within the European Commission funded research project ‘More Moore' that is looking at a range of EUVL challenges a small team of scientist from Focus GmbH and two German universities, Bielefeld and Mainz have announced that they have been able to identify buried defects as small as 50nm under the multilayer coating of an EUV mask blank.
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Memory fab ramps give strong boost to ASML’s order intake Print E-mail
Sep 06, 2006 at 12:59 PM
ASMLASML has announced that orders from both NAND Flash and DRAM chip manufacturers in the current quarter have significantly boosted the lithography tool supplier's unit bookings for its 3Q06 financial quarter than previously guided. ASML expects orders to come in at around 93 units, similar to the Q2 order intake level that had also been revised upwards from previous guidance.
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ASML delivers first two EUV tools, Nikon to follow Print E-mail
Aug 30, 2006 at 02:06 PM
ASMLTwo major R&D facilities, CNSE's Albany NanoTech in New York State and IMEC of Belgium have received delivery of the first two first ‘full field' EUV lithography systems designed and built by ASML.Write Comment (0 comments)
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Order Win: X-FAB selects Cadence DFM tools for mixed signal IP cores Print E-mail
Aug 23, 2006 at 01:06 PM
Cadence DFM toolsX-FAB Semiconductor Foundries AG is implementing Cadence Design Systems' Virtuoso NeoCircuit DFM solution to identify and eliminate yield-related problems early in the design phase and fabrication process of its analog and mixed-signal IP cores, according to the company.Write Comment (0 comments)
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Obducat granted non-stick nano-imprint patent Print E-mail
Aug 17, 2006 at 04:47 PM
ObducatObducat AB has announced that it has received notification from the US Patent Office that it will be issued with a new patent for its nano imprint lithography processes concerning non-stick and particle repelling coating materials.Write Comment (0 comments)
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Synopsys confirms SIGMA-C acquisition Print E-mail
Aug 16, 2006 at 06:10 PM
SynopsysSynopsys has confirmed that it has acquired lithography modeling specialist SIGMA-C in a $20.5 million all cash transaction. The acquisition is intended to boost Synopsys Design for Manufacturing (DFM) software portfolio while enabling closer modeling to actual manufacturing layouts of critical lithography steps.Write Comment (0 comments)
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Partnership to verify litho masks Print E-mail
Aug 09, 2006 at 02:58 PM
Photomask productionBy Dr Mike Cooke

Dainippon Printing (DNP) and Brion Technologies have started a joint development program to improve the productivity and quality of leading-edge photomask production. This program involves the application of Brion's verification tools, typically used for design verification in semiconductor manufacturing, to the photomask production process.
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Gartner expects Nikon to ship 10 immersion lithography systems in 06 Print E-mail
Aug 01, 2006 at 03:18 PM
Immersion Lithography SystemsAccording to the latest Gartner Dataquest review of the semiconductor lithography tool market, Nikon is expected to ship 10, 193nm ArF immersion lithography systems in 2006. The market research firm believes Nikon shipped its first ‘production' tool in 1Q06 as confirmed by Nikon in a press release during SPIE conference at the end of February 2006. Nikon figures for shipments in its first quarter calendar year that started in April 06 was noted for showing no immersion tools being shipped in that period. The company had previously stated that it expected to ship 9 immersion tools for its 2006/7 financial year, indicating that Nikon may well ship more immersion tools than it is currently projecting.Write Comment (0 comments)
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