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Critical Components Product Briefs
UHP gas pressure regulator reduces system footprint Print E-mail
Oct 08, 2004 at 09:00 PM
ImageProduct Briefing Outline: The new ultrahigh-purity, manually adjustable Swagelok HFE series gas pressure regulator supports flow rates up to 160 std L/min and maximum inlet pressures up to 150 psig (10.3 bar). It is designed for 1 1/8 in. C-ring integrated gas systems.
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Linear Stage Uses Direct-Coupled Brushless Motor For High Servo Bandwidth And Smooth Velocity Print E-mail
Oct 08, 2004 at 08:00 PM
ImageProduct Briefing Outline: The ATS125 is Aerotech's smallest hardcover, side-sealed linear stage. The integral brushless motor reduces the overall footprint of the stage enabling its deployment in space-constrained applications, while the hardcover provides protection from debris created in the manufacturing process.Write Comment (0 comments)
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Remote plasma source maximizes process development flexibility Print E-mail
Oct 08, 2004 at 07:00 PM
ImageProduct Briefing Outline: Advanced Energy Industries, has unveiled its next-generation "Litmas RPS 1501" linear-inductive remote plasma source for advanced thin-film processes. Especially well-suited for wafer pre-clean, photoresist strip, gate dielectric deposition and atomic layer deposition (ALD) applications, the Litmas RPS 1501 also facilitates the development of a wide variety of other advanced process applications.Write Comment (0 comments)
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Pressure transducer for stabilty and realiability in pressure measurments Print E-mail
Oct 08, 2004 at 06:00 PM
ImageProduct Briefing Outline: Mykrolis Corporation has launched SolidSense II, which the company claims, represents the most recent advancements in pressure transducer technology. Utilizing leading edge, glass-fused strain gauge technology and digital signal processing, SolidSense II raises the standard for high performance in gas delivery systems and tools used for pressure measurement in semiconductor processing.Write Comment (0 comments)
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Magentic levitation rotary actuator with zero-contamination vacuum motion Print E-mail
Oct 08, 2004 at 05:00 PM
ImageProduct Briefing Outline: Omni-Lev is Rigaku's new rotary actuator system for use in contamination-sensitive applications. Unlike traditional ball bearing based actuators, Omni- Lev is supported entirely by magnetic fields, eliminating contact between moving parts that can generate damaging particles. This invention (patent pending) resulted from a two-year development at Rigaku's vacuum business unit, Rigaku Mechatronics.Write Comment (0 comments)
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Copper electroplating gets finer filters Print E-mail
Oct 08, 2004 at 04:00 PM
ImageProduct Briefing Outline: Pall Corporation is introducing its "Varafine Varaclean" Copper Electroplate Technology (CET) Series Filter Cartridges. This is a new family of filters specifically designed to reduce defects and improve productivity in high-volume copper plating processes. The new filters represent an important advance in the semiconductor industry's move to mainstream manufacturing of copper devices across more product types.Write Comment (0 comments)
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Environmentally-frinedly cost-effective cleaning solution Print E-mail
Oct 08, 2004 at 03:00 PM
ImageProduct Briefing Outline: MKS Instruments, has introduced the "LIQUOZON Single" - an ozonated water system that delivers ultra-pure ozonated water for wafer and substrate cleaning during integrated circuit processing. Designed specifically for installation in single-wafer cleaning tools, the LIQUOZON Single system provides cost-conscious fabs with a smaller footprint, lower gas and deionized water consumption, easier installation, and enhanced technology.Write Comment (0 comments)
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Factory Mutual 4910 rated resistant PVDF high purity sheet Print E-mail
Oct 08, 2004 at 02:00 PM
ImageProduct Briefing Outline: George Fischer has announced the availability of its new Factory Mutual (FM) 4910 PVDF (polyvinylidene fluoride) high purity sheet material, which meets the requirements of FM Clean Room Materials Flammability Test Protocol, Class 4910.Write Comment (0 comments)
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Next generation retaining ring materials for CMP tools Print E-mail
Oct 08, 2004 at 01:00 PM
ImageProduct Briefing Outline: Quadrant Engineering Plastic Products has launched longer production life chemical mechanical planarization (CMP) retaining rings. "Semitron" CMP LL5 and "Semitron" CMP XL20, offer claimed service life up to 20 times greater than materials currently used to make retaining rings. The materials are available in stock shapes specifically for precision-machined parts for critical tolerance CMP applications.Write Comment (0 comments)
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Economical new vibration isolator for low loads Print E-mail
Oct 08, 2004 at 12:00 PM
ImageProduct Briefing Outline: Newport's "ND60 NewDamp" isolator provides economical vibration-isolation support for lowload applications, such as breadboards, optical rails, laser systems, and Newport's line of workstations. Fabricated from a highly engineered form of U-16 polyurethane, these new products deliver up to five times better damping than other commercial elastomeric isolators. In addition, the use of a novel (multiple-cone) geometry yields isolation performance that is virtually load-independent, unlike systems based on softer materials.Write Comment (0 comments)
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