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Mar 27, 2006 at 09:44 AM |
Product Briefing Outline: Integrated Materials, Inc. has launched a wide ranging line of poly silicon furnaceware called "SiFusion." The suite of SiFusion furnaceware includes furnace boats, towers, injectors and pedestals designed to fit furnaces manufactured by ASM, Aviza, Hitachi-Kokusai and Tokyo Electron. SiFusion furnaceware meets the requirements for vertical furnace applications in both 200 mm and 300 mm environments, including thin-film (LPCVD -- silicon nitride and poly silicon), high temperature (anneal/drive), and High Temperature Oxidation, among others. Integrated Materials claims to be the first to perfect the production of poly silicon structures for furnaces used in semiconductor manufacturing. Write Comment (0 comments) |
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Nov 25, 2005 at 05:22 PM |
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Product
Briefing Outline: CyberOptics
Semiconductor, has made its wafer mapping sensors in a smaller package to
accommodate applications where space is limited or a smaller sensor footprint
is desired. The EX-QS features the same capabilities as standard size EX-Q
mappers, which are used for the detection of semiconductor wafers and slotting
errors in cassettes or FOUPs.Write Comment (0 comments) |
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Nov 25, 2005 at 05:22 PM |
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Product
Briefing Outline: CyberOptics
Semiconductor, has made its wafer mapping sensors in a smaller package to
accommodate applications where space is limited or a smaller sensor footprint
is desired. The EX-QS features the same capabilities as standard size EX-Q
mappers, which are used for the detection of semiconductor wafers and slotting
errors in cassettes or FOUPs.Write Comment (0 comments) |
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Nov 18, 2005 at 06:25 PM |
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Product Briefing Outline: Carpenter Advanced Ceramics, Inc. (CAC) has developed a new 99.8% pure alumina, specifically for semiconductor processing. CAC998 is an etch-grade material that is claimed to offer improved plasma and chemical resistance by eliminating free silica at the grain boundaries and having low silica content in the material matrix. Write Comment (0 comments) |
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Nov 18, 2005 at 06:25 PM |
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Product Briefing Outline: Carpenter Advanced Ceramics, Inc. (CAC) has developed a new 99.8% pure alumina, specifically for semiconductor processing. CAC998 is an etch-grade material that is claimed to offer improved plasma and chemical resistance by eliminating free silica at the grain boundaries and having low silica content in the material matrix. Write Comment (0 comments) |
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Oct 03, 2005 at 05:53 PM |
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Product Briefing Outline: Trazar Corporation has launched what it claims is the industry's first configurable automatic impedance match (CAIM) development platform for RF Matches, called "Horizon Match," that is expected to reduce plasma tool design and development time by more than half, which is done by integrating readily available and verified building blocks. It is intended for 200mm and 300mm, plasma-based semiconductor equipment, medical systems and industrial applications. Write Comment (0 comments) |
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Sep 28, 2005 at 12:24 AM |
Product Briefing Outline: Swagelok Semiconductor
Services Company has launched the pneumatically actuated DRP series
3-way diaphragm valve, expanding its ultrahigh-purity fluoropolymer
diaphragm valve offering. Meeting SEMI Standard F57-0301 for
ultrahigh-purity polymer system components, the new valve has many
applications,
including aggressive CMP slurry, acid, chemical, and ultrahigh-purity
DI water delivery systems. All wetted parts are made from DuPont(R)
Teflon(R) modified PTFE and PFA.
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Sep 27, 2005 at 11:21 PM |
Product Briefing Outline: Mykrolis Corporation has announced the release
of the XacTorr CMC series of compact capacitance diaphragm gauges (CDGs) for
vacuum processes that provide accurate total pressure measurement independent of gas composition.
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Sep 27, 2005 at 11:12 PM |
Product Briefing Outline: Brooks Automation, has
announced the release of the ‘Marathon 2' vacuum platform for process
and metrology equipment. The Marathon 2 vacuum platform, available in
compact and cluster configurations, provides increased performance and
shorter integration and cycle times for vacuum applications at 90nm
technology nodes to sub-45nm nodes.
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Sep 27, 2005 at 11:08 PM |
Product Briefing Outline: Asahi/America, has
introduced its ‘Dymatrix NMV Valve.' Featuring a uniquely designed
needle plug with PTFE diaphragm seal, the valve allows for easy &
precise linear flow control. Constructed fromhigh purity PTFE, the NVM
Series Valve is ideal for HP chemical processing and CMP applications.
Its design features true linear flow characteristics, a diaphragm that
isolates moving parts, as well as no wetted threads and no particle
generation, according to the company.
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