Home
News
Blogs
Fabtech Jobs
Product Briefings
Going Places
300mm Activity Reports
Core Sections
Wafer Processing
Lithography
Fab management
Materials & Gases
Critical Components
Cleanroom
EHS
 
Find

GlobalSpec - The Engineering Search Engine
 
Home arrow Critical Components arrow Product Briefings
Critical Components Product Briefs
New Product: New furnaceware from Integrated Materials mirrors wafer composition for the first time Print E-mail
Mar 27, 2006 at 09:44 AM
ImageProduct Briefing Outline: Integrated Materials, Inc. has launched a wide ranging line of poly silicon furnaceware called "SiFusion." The suite of SiFusion furnaceware includes furnace boats, towers, injectors and pedestals designed to fit furnaces manufactured by ASM, Aviza, Hitachi-Kokusai and Tokyo Electron. SiFusion furnaceware meets the requirements for vertical furnace applications in both 200 mm and 300 mm environments, including thin-film (LPCVD -- silicon nitride and poly silicon), high temperature (anneal/drive), and High Temperature Oxidation, among others. Integrated Materials claims to be the first to perfect the production of poly silicon structures for furnaces used in semiconductor manufacturing. Write Comment (0 comments)
Read more...
New Product: CyberOptics wafer sensor meets space limitation in small footprint tools Print E-mail
Nov 25, 2005 at 05:22 PM
Product Briefing Outline: CyberOptics Semiconductor, has made its wafer mapping sensors in a smaller package to accommodate applications where space is limited or a smaller sensor footprint is desired. The EX-QS features the same capabilities as standard size EX-Q mappers, which are used for the detection of semiconductor wafers and slotting errors in cassettes or FOUPs.Write Comment (0 comments)
Read more...
New Product: CyberOptics wafer sensor meets space limitation in small footprint tools Print E-mail
Nov 25, 2005 at 05:22 PM
Product Briefing Outline: CyberOptics Semiconductor, has made its wafer mapping sensors in a smaller package to accommodate applications where space is limited or a smaller sensor footprint is desired. The EX-QS features the same capabilities as standard size EX-Q mappers, which are used for the detection of semiconductor wafers and slotting errors in cassettes or FOUPs.Write Comment (0 comments)
Read more...
New Product: High density seal extends plasma chamber clean cycles Print E-mail
Nov 18, 2005 at 06:25 PM

Product Briefing Outline: Carpenter Advanced Ceramics, Inc. (CAC) has developed a new 99.8% pure alumina, specifically for semiconductor processing. CAC998 is an etch-grade material that is claimed to offer improved plasma and chemical resistance by eliminating free silica at the grain boundaries and having low silica content in the material matrix.

Write Comment (0 comments)
Read more...
New Product: High density seal extends plasma chamber clean cycles Print E-mail
Nov 18, 2005 at 06:25 PM

Product Briefing Outline: Carpenter Advanced Ceramics, Inc. (CAC) has developed a new 99.8% pure alumina, specifically for semiconductor processing. CAC998 is an etch-grade material that is claimed to offer improved plasma and chemical resistance by eliminating free silica at the grain boundaries and having low silica content in the material matrix.

Write Comment (0 comments)
Read more...
New Product: Trazar launches modular configurable RF plasma matching Print E-mail
Oct 03, 2005 at 05:53 PM

Product Briefing Outline: Trazar Corporation has launched what it claims is the industry's first configurable automatic impedance match (CAIM) development platform for RF Matches, called "Horizon Match," that is expected to reduce plasma tool design and development time by more than half, which is done by integrating readily available and verified building blocks. It is intended for 200mm and 300mm, plasma-based semiconductor equipment, medical systems and industrial applications.

Write Comment (0 comments)
Read more...
Pneumatically actuated 3-way diaphragm valve Print E-mail
Sep 28, 2005 at 12:24 AM
ImageProduct Briefing Outline: Swagelok Semiconductor Services Company has launched the pneumatically actuated DRP series 3-way diaphragm valve, expanding its ultrahigh-purity fluoropolymer diaphragm valve offering. Meeting SEMI Standard F57-0301 for ultrahigh-purity polymer system components, the new valve has many applications,
including aggressive CMP slurry, acid, chemical, and ultrahigh-purity DI water delivery systems. All wetted parts are made from DuPont(R) Teflon(R) modified PTFE and PFA.

Write Comment (0 comments)
Read more...
Compact design less than half the size of traditional vacuum gauges Print E-mail
Sep 27, 2005 at 11:21 PM
ImageProduct Briefing Outline: Mykrolis Corporation has announced the release
of the XacTorr CMC series of compact capacitance diaphragm gauges (CDGs) for
vacuum processes that provide accurate total pressure measurement independent of gas composition.

Write Comment (0 comments)
Read more...
Vacuum cluster platform with improved compact configuration Print E-mail
Sep 27, 2005 at 11:12 PM
ImageProduct Briefing Outline: Brooks Automation, has announced the release of the ‘Marathon 2' vacuum platform for process and metrology equipment. The Marathon 2 vacuum platform, available in compact and cluster configurations, provides increased performance and shorter integration and cycle times for vacuum applications at 90nm technology nodes to sub-45nm nodes.

Write Comment (0 comments)
Read more...
Diaphram valve offers precise linear flow control Print E-mail
Sep 27, 2005 at 11:08 PM
ImageProduct Briefing Outline: Asahi/America, has introduced its ‘Dymatrix NMV Valve.' Featuring a uniquely designed needle plug with PTFE diaphragm seal, the valve allows for easy & precise linear flow control. Constructed fromhigh purity PTFE, the NVM Series Valve is ideal for HP chemical processing and CMP applications. Its design features true linear flow characteristics, a diaphragm that isolates moving parts, as well as no wetted threads and no particle generation, according to the company.

Write Comment (0 comments)
Read more...
<< Start < Previous 1 2 3 4 Next > End >>

Results 29 - 42 of 52
Subscribe
300mm