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May 10, 2007 at 02:03 PM |
 Product Briefing Outline: OSRAM has introduced a new xenon excimer lamp system called ‘XERADEX' that is claimed to yield four times the vacuum ultraviolet (VUV) radiation power of conventional excimer radiators in pulse mode. Applications include wafer surface treatment, ozone production, lacquer frosting, water purification, and many more. The quartz bulb functions as a dielectric barrier within a unique electrode system, which prevents the formation of an electric arc during the discharge phase.
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Mar 12, 2007 at 03:10 PM |
 Product Briefing Outline: The Partek operation of Parker Hannifin has introduced the 20 Series fluoropolymer diaphragm valve that is claimed to feature a flow path and valve seat area that optimizes fluid flow dynamics, for minimal pressure drop and enhanced flow rates, and resistance to aggressive media, making it suitable for CMP slurry and other aggressive fluid applications.
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Nov 07, 2006 at 03:45 PM |
 Product Briefing Outline: Entegris Inc. has introduced the new ‘Guardian' family of high-flow cartridge filters that are designed to be non-reactive to a wide range of plating additives and provide higher levels of particle retention as well as longer life. Guardian ECD filter cartridges are applicable to high-purity electrochemical deposition processes, such as copper, nickel, and gold plating.
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Nov 06, 2006 at 01:39 PM |
 Product Briefing Outline: MKS Instruments has introduced the Low Pressure PiMFC Mass Flow Controller for maximum utilization of Safe Delivery Source gases used in semiconductor ion implant applications. It offers accurate and precise control of low gas flows, from below 1 sccm up to 20 sccm, over a wide pressure range with source gas delivery pressure as low as 4 Torr.Write Comment (0 comments) |
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Oct 19, 2006 at 04:48 PM |
 Product Briefing Outline: Partek, a division of Parker Hannifin, has introduced a new thermocouple sensor assembly, designated the TS Series, that is designed to provide reliable temperature monitoring for high-purity fluid systems which traditionally use fluoropolymer components. The sensor assembly overcomes perceived weaknesses with current thermocouple sensors that potentially reduce long term stability, and is expected to deliver considerable cost savings to users over its lifetime, according to the company.
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Sep 20, 2006 at 04:17 PM |
 Product Briefing Outline: GF Piping has announced the availability of a new Type ‘567/568 Butterfly Valve.' The new corrosion-resistant valve incorporates several new design features that result in long service life, high safety, excellent sealing capabilities, and modular flexibility. Waste water and electroplating applications are of particular application uses, according to the company.
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Aug 29, 2006 at 06:47 PM |
 Product Briefing Outline: MKS Instruments has introduced the Ion Systems Model 5200-SR Digital Ionization Sensor for use in semiconductor equipment front end modules (EFEMs) or in process modules, due to its small footprint.Write Comment (0 comments) |
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Aug 29, 2006 at 04:46 PM |
 Product Briefing Outline: BlueShift Technologies has announced the release of ‘QuickLink', a novel, linkable and adaptable wafer handling system. The system architecture is targeted at small-lot manufacturing and is currently configured for wafers up to 300mm but is easily scalable to 450mm, BlueShift have stated. QuickLink is designed to provide improved vacuum-process isolation, reduced wafer-to-wafer cross-contamination, minimal risk of wafer thermal stressing, and excellent low-particulate performance, according to the company. Write Comment (0 comments) |
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Aug 29, 2006 at 03:44 PM |
 Product Briefing Outline: Ferrotec Corporation has made improvements to the standard ferrofluid magnetic liquids which provide the core sealing function in Ferrotec's ‘Ferrofluidic' vacuum rotary feedthroughs. Ferrotec vacuum feedthroughs are used in semiconductor manufacturing equipment, vacuum chambers, and other clean and controlled process environments. Ferrotec claims the new liquid improvements have reduced operating torque, reduced vapor pressure, and provided better thermal stability in demanding process environments.Write Comment (0 comments) |
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Aug 23, 2006 at 06:49 PM |
 Product Briefing Outline: Advanced Energy Industries has introduced a new product family of its Sekidenko optical fiber thermometers (OFTs) and emissometers. The new OR4000 product family provides non-contact temperature measurement for RTP, HDP-CVD, MO-CVD, UV cure and a variety of other semiconductor processes. The systems use a small, modular platform that has improved optical signal gathering, background subtraction techniques, and enhanced electronics resolution to provide a wider range of measurements and lower temperature capabilities, according to the company.Write Comment (0 comments) |
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Critical Components 
