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Feb 04, 2005 at 04:00 PM |
Product Briefing Outline: Thermo Electron Corporation has
announced the release of its latest X-ray fluorescence instrument for
semiconductor metrology, the "MicroXR" microbeam XRF platform. Designed
for on-line and nearline measurements on semiconductor wafers, optical
devices, high-density chip-scale packaging and substrate applications,
the MicroXR presents particular benefits for the semiconductor and
microelectronics markets.
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Feb 04, 2005 at 03:00 PM |
 Product Briefing Outline: ECI Technology
has announced the launch of its "QUALI-LINE QLC-8500" system. The
QLC-8500 is an online chemical monitoring system for electroless baths
used in VLSI damascene Cobalt capping applications. In addition to the
proven CVS and Titration techniques, the QLC-8500 adds Spectroscopy,
Oxidation Reduction Potential (ORP), Particle Count and many other
critical capabilities to analyze and control electroless deposition.
Multiple orders have already been booked, according to the company.
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Feb 04, 2005 at 02:00 PM |
 Product Briefing Outline: Tokyo Electron
(TEL) has announced a significant improvement
in the design of their SCCM (Super Capacitively
Coupled Module) chamber. The focus ring and
supporting parts have been redesigned to greatly reduce
and possibly eliminate the deposition of backside polymer
at the wafer edge and bottom.
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| Results 99 - 101 of 101 |
Wafer Processing 
