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Home arrow Lithography arrow Product Briefings
Lithography Product Briefs
New Product: Synopsys takes care of strain engineering in DFM Print E-mail
Oct 18, 2006 at 12:38 PM
ImageProduct Briefing Outline: Synopsys Inc. has introduced a new family of process-aware design-for-manufacturing (PA-DFM) products that analyze variability effects at the custom/analog design stage for 45nm node and below. The PA-DFM product family's core products -- Synopsys Seismos and Paramos - link manufacturing variation information back to design, enabling custom IC (IP, cell, memory and analog) designers to optimize layouts and maximize yields.

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New Product: PDF Solutions upgrades parametric yield analysis of analog and RF IC designs Print E-mail
Oct 10, 2006 at 03:05 PM
ImageProduct Briefing Outline: PDF Solutions Inc. has introduced a new release of its ‘Circuit Surfer' software for characterizing and optimizing the parametric yield of analog and radio frequency (RF) integrated circuit (IC) designs. The new release features the company's patented mismatch simulation technology, which helps to minimize the number of simulations required to characterize parametric yield. It is also claimed to reduce design re-spins by identifying parametric yield loss mechanisms not visible when using verification methods based on corner modeling.

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New Product: ASML’s ‘TWINSCAN’ XT:1900i near limit of immersion capabilities Print E-mail
Sep 25, 2006 at 10:42 AM
ImageProduct Briefing Outline: ASML has introduced the ‘TWINSCAN' XT:1900i. In combination with ASML proprietary low k1 capabilities, this new system is designed to extend optical immersion lithography for volume production at the 40nm half-pitch dimensions with an overlay specification of 6nm (SMO). ASML's newest 193-nm wavelength immersion scanner uses a 1.35 NA inline catadioptric lens assembly that is near the practical limit for water-based immersion technology. ASML expects to begin shipping the XT:1900i by mid 2007.Write Comment (0 comments)
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New Product: Carl Zeiss SMT’s Starlith 1900i pushes limits of catadioptric lenses Print E-mail
Sep 25, 2006 at 10:35 AM
ImageProduct Briefing Outline: Carl Zeiss SMT has announced the development of its lithography optical system, ‘Starlith' 1900i. The new system has a numerical aperture (NA) of 1.35, the highest NA currently designed, that will be used for volume chip production at 40nm half-pitch node. The system will be part of ASML's new ‘TWINSCAN' XT:1900i immersion lithography tool that will begin shipments in 2007.
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New Product: Brion’s new Tachyon M3D accounts for 3D imaging effects on photomasks Print E-mail
Sep 22, 2006 at 05:26 PM
ImageProduct Briefing Outline: Brion Technologies has introduced the ‘Tachyon M3D,' computational technology to enable more accurate OPC and OPC verification by incorporating mask 3D imaging effects.Write Comment (0 comments)
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New Product: Nikon’s NSR-S610C immersion tool uses 1.30 NA catadioptric lens for sub-45nm patterning Print E-mail
Sep 20, 2006 at 10:54 AM

ImageProduct Briefing Outline: Nikon Corporation has introduced a new lithography tool that is designed to meet the requirements for mass production of 45nm memory and of 32nm logic devices. The NSR-S610C, an ArF immersion scanner, includes an advanced 1.30 NA projection lens and POLANO, Nikon's fourth generation polarization technology. The system will also include proprietary Nikon Local Fill Technology and the Tandem Stage, which enable the system to achieve a claimed throughput of 130 wafers or more per hour. Systems will start shipping by the end of 2006, according to the company.

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New Product: Invarium offers ‘wet’ versus ‘dry’ lithography patterning synthesis trade-offs: 45-32nm Print E-mail
Sep 18, 2006 at 04:52 PM

InvariumProduct Briefing Outline: Invarium has launched ‘Dimension45/32' design to manufacturing synthesis tools to specifically address patterning challenges at the 45 and 32nm nodes. Dimension45/32 is designed to enable lithography and photomask synthesis teams to select and optimize the right combination of exposure strategies and full-chip photomask layout synthesis.  It also enables layout retargeting, if necessary, to achieve the best post-etch results on silicon, with, according to the company, the largest process window and best yield. Dimension45/32 is currently being customer-qualified in North America, and the company has stated that a second customer qualification program will immediately commence in Asia.


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New Product: Advance lithography lens analysis and correction software from Litel Instruments boosts Print E-mail
Aug 29, 2006 at 05:39 PM
Litel InstrumentsProduct Briefing Outline: Litel Instruments, has released of two new products designed to increase silicon chip performance and yield in leading edge semiconductor factories. The new products, dubbed ‘Distortion Mapper' (DMAP) and ‘Transmission Mapper' (TMAP), are used for analyzing and optimizing lens and illumination performance of photolithography tools.Write Comment (0 comments)
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New Product: Electrical DFM issues handled by Blaze DFM’s optimization software Print E-mail
Aug 29, 2006 at 04:19 PM
Blaze DFMProduct Briefing Outline: Blaze DFM, has announced the Release 1.1 update to ‘Blaze MO' optimization software, the company's "Electrical DFM" solution. In electrical DFM, "design requirements" explicitly refers to timing and power (electrical) requirements, not just geometric information. Bringing design requirements forward into manufacturing means using the actual timing and power constraints supplied by the design team to drive what happens in manufacturing. Typically, this is done by interfacing with the resolution enhancement technology (RET) process in manufacturing.Write Comment (0 comments)
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New Product: New DFM suite from Synopsys aims to shorten correction, correlation & completion tasks. Print E-mail
Aug 23, 2006 at 06:11 PM
SynopsysProduct Briefing Outline: Synopsys has launched its PrimeYield tool suite that is designed to integrate design with manufacturing by accurately predicting design-induced mechanisms that threaten manufacturing tolerances and by providing automated correction guidance to upstream design implementation tools. PrimeYield provides predictive and corrective actions for manufacturing-sensitive design patterns before tapeout, according to the company. This is due to using production-baseline technology and manufacturing models by the leading foundries and integrated device manufacturers (IDMs). Synopsys reports that PrimeYield can reduce time to yield by 4 to 6 weeks at advanced nodes.Write Comment (0 comments)
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