KLA-Tencor Corporation, Design and process limited yield at the 65nm node and beyond...K. Monahan & B. Trafas, KLA-Tencor Corporation - Fabtech - The online information source for semiconductor professionals

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KLA-Tencor Corporation, Design and process limited yield at the 65nm node and beyond...K. Monahan & B. Trafas, KLA-Tencor Corporation.pdf (2,636.36 Kb)

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