Selective single-wafer wet etching of Hf-based layers...H. Kraus, F. Kovacs & L. Archer, SEZ AG, & J. Snow, M. Claes, etc., IMEC - Fabtech - The online information source for semiconductor professionals

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Selective single-wafer wet etching of Hf-based layers...H. Kraus, F. Kovacs & L. Archer, SEZ AG, & J. Snow, M. Claes, etc., IMEC.pdf (1,848.13 Kb)

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