Copper deposition - challenges at 32nm...Dr. P.H. Haumesser, Dr. S. Maitrejean & A. Roule, CEA-LETI and Dr. G. Passemard, STMicroelectronics - Fabtech - The online information source for semiconductor professionals

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Copper deposition - challenges at 32nm...Dr. P.H. Haumesser, Dr. S. Maitrejean & A. Roule, CEA-LETI and Dr. G. Passemard, STMicroelectronics.pdf (475.09 Kb)

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