A feasibility study of chromium-rich oxide-passivated stainless steel tubing for gas delivery systems...S. Krishnan & M. Saleem, Ultra Clean Technology - Fabtech - The online information source for semiconductor professionals

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A feasibility study of chromium-rich oxide-passivated stainless steel tubing for gas delivery systems...S. Krishnan & M. Saleem, Ultra Clean Technology.pdf (301.36 Kb)

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